62 results about "Catalytic chemical vapor deposition" patented technology

A method and apparatus are provided for the cost effective formation of a composite material which includes metallized carbon nanotubes and/or nanofibers that can be used to form portions of an energy storage device, such as a lithium ion battery. In one embodiment, carbon nanotubes are formed on a host substrate using a catalytic chemical vapor deposition process. An initiation-adhesion layer is formed over the carbon nanotubes and a metallic layer is then deposited on the initiation-adhesion layer and each layer is formed using a wet deposition process. In one embodiment, portions of the host substrate are used to form an electrochemical storage device that may be integrated with other formed electrochemical storage devices to create an interconnected battery array. The battery array may be formed as a woven sheet, panel, or other flexible structure depending upon the type of host substrate material. In one case, the host substrate material may be a flexible fibrous material that has multiple layers formed thereon to form a fiber battery, such as a lithium ion battery.

A catalytic chemical vapor deposition apparatus is provided for producing a thin film of desired film quality, by making a particle countermeasure against the release gas such as H₂O and deposit materials from or on members composing the structure of the inside of the processing chamber and the inner wall of the processing chamber.

A catalytic chemical vapor deposition apparatus comprising a substrate 4 arranged in a processing chamber 1, a shower plate 7 facing the substrate 4, and a catalyst 5 comprising metal tungsten wire activating a raw material gas from the shower plate 7, where the catalyst 5 is interposed between the substrate 4 and the shower plate 7 and where a cylindrical peripheral wall 23 encloses the space where the substrate 4 and the shower plate 7 face each other in the processing chamber 1, and additionally comprising a vacuum gas discharge unit so as to make the pressure inside the cylindrical peripheral wall 23, namely the pressure in the film formation region 26 higher than that in the other region.

Apparatus, systems, and methods are provided for the production and application of carbon nanotubes (CNTs) on structures. Disclosed embodiments relate to apparatus, systems, and methods for the production of CNTs in an open tubular configuration on the inside surface of a steel capillary tubing. Disclosed embodiments of means for the production of CNTs include, self-assembly through a catalytic chemical vapor deposition (CVD) process. Applications of the apparatus, systems, and methods disclosed generally relate to sorbency, and more particularly, include adsorption, separation, and chromatographical application. Disclosed embodiments include apparatus, systems, and methods, for the production of high performance stationary phases of CNTs with advantageous temperate stability for high resolution chromatographical applications.

The invention provides a preparation method of an iron filled carbon nano tube and a reaction device. The preparation method of the iron filled carbon nano tube comprises the following steps of: preparing the iron filled carbon nano tube by adopting an inorganic covalent compound of iron namely ferric chloride anhydrous as a catalyst precursor and selecting different carbon sources through floating catalysis chemical vapor deposition method, wherein the iron filled carbon nano tube comprises a non-nitrogen-doped iron filled carbon nano tube or a nitrogen-doped iron filled carbon nano tube. The preparation method of the iron filled carbon nano tube disclosed by the invention is simple and scientific in steps and can prepare a high-iron filled carbon nano tube. The invention further discloses a reaction device of the preparation method of the iron filled carbon nano tube. According to the preparation method of the iron filled carbon nano tube and the reaction device, a plurality of disadvantages in the prior art can be overcome; and the advantages that the preparation method is simple and the obtained iron filled carbon nano tube has high iron filling rate are realized.

The selective growth of vertically aligned, highly dense carbon nanotube (CNT) arrays using a thermal catalytic chemical vapor deposition (CCVD) method via selection of the supporting layer where the thin catalyst layer is deposited on. A thin iron (Fe) catalyst deposited on a supporting layer of tantalum (Ta) yielded CCVD growth of the vertical dense CNT arrays. Cross-sectional transmission electron microscopy revealed a Vollmer-Weber mode of Fe island growth on Ta, with a small contact angle of the islands controlled by the relative surface energies of the supporting layer, the catalyst and their interface. The as-formed Fe island morphology promoted surface diffusion of carbon atoms seeding the growth of the CNTs from the catalyst surface.

The invention discloses a preparation method of a carbon nano-fiber film, and particularly discloses a method for preparing a high-strength polyacrylonitrile-based carbon nano-fiber film by using electrostatic spinning-high temperature carbonization in combination with a catalytic chemical vapor deposition process. The method comprises the following steps: preparing a polyacrylonitrile-based carbon nano-fiber porous reinforcement with high flexibility but low strength by using electrostatic spinning and high temperature carbonization; and further filling vapor growth carbon nano-fibers into the polyacrylonitrile-based carbon nano-fiber porous reinforcement by using a chemical vapor deposition technology to obtain the carbon nano-fiber film with high flexibility and high strength. Compared with a polyacrylonitrile-based carbon nano-fiber film prepared by merely using an "electrostatic spinning-high temperature carbonization" technology, the carbon nano-fiber film prepared with the method disclosed by the invention has the advantage that the in-plane tensile strength is increased by 80-120 percent.

The invention discloses a method and a device for continuously preparing a carbon nano-tube composite thin film or fiber. The method comprises the following steps: preparing a continuous and un-contracted carbon nano-tube aggregate by utilizing a floating catalytic chemical vapor deposition method; continuously or intermittently spraying at least one selected material or a fluid containing at least one selected material to the carbon nano-tube aggregate, so that the selected material is fully in contact with and compounded with a plurality of carbon nano-tubes forming the carbon nano-tube aggregate to form a carbon nano-tube composite aggregate; collecting after the carbon nano-tube composite aggregate is contracted to obtain the continuous carbon nano-tube composite thin film or fiber. The method and the device disclosed by the invention have the benefit that as the carbon nano-tube aggregate is compounded with the selected material before contraction, the compound concentration and the contact area of the selected material and the carbon nano-tubes can be greatly improved, so that the controllable online continuous preparation of the carbon nano-tube composite thin film or fiber with high compound degree and uniform structure is realized.

The invention discloses a heteroatom doped graphene coated composite electrode material and a preparation method thereof, firstly an electrode material and a catalyst are mixed to obtain a mixed precursor for catalytic chemical vapor deposition in the presence of both a compound containing a carbon source and a compound containing a doping source to obtain the heteroatom doped graphene coated composite electrode material. The composite electrode material comprises the electrode material and doped graphene coating the surface of the electrode material, and the doped atom is any one or a combination of at least two of boron, sulfur or phosphorus, in the heteroatom doped graphene coated composite electrode material, a heteroatom doped graphene coating layer has good uniformity and less lamination, the heteroatom doped graphene coating layer is uniformly and tightly combined with an electrode material matrix, is not easy to fall off, not easy to agglomerate and wrinkle, and conducive to improvement of the performance of electrical contact with the electrode material matrix, can protect the surface of the electrode material from erosion, can significantly improve the properties of the electrode material, and enhances the electrical conductivity and the cycle life of the electrode material.

The present invention is a catalytic chemical vapor deposition method and apparatus for synthesizing carbon nanotubes and/or carbon nanofibers (CNTs) on a substrate by selectively heating a catalyst for CNT synthesis on or near the surface of the substrate. Selective heating of the catalyst is achieved using an exothermic oxidation reaction on the surface of the catalyst, inductive heating from a radio frequency source, or both. Selective heating of the catalyst prevents heating of the substrate and enables the synthesis of CNTs on temperature sensitive substrates.

The invention provides a preparation method of a nitrogen-doped carbon nanotube thin film having high electrochemical properties and discloses a preparation method of an anode material of a nitrogen-doped carbon nanotube lithium-ion battery. The following floating catalytic chemical vapor deposition method is adopted: a liquid-phase carbon source, a nitrogen source, a catalyst and an accelerant are mixed and then ultrasonically dispersed to obtain an even precursor solution; a reactor is heated to the range of 900-1200 DEG C in an argon environment and kept at a constant temperature, under the driving of a carrier gas (hydrogen or hydrogen and argon mixed gas), and the precursor solution is injected into the reactor at the rate of 2-12mL/h, then a uniform and continuous thin film can be obtained; the thin film is thermally treated for 1-4 hours under the air condition of 300-600 DEG C, and finally, the anode material of the nitrogen-doped carbon nanotube lithium-ion battery is obtained. The preparation method is simple in process, relatively low in energy consumption, and capable of further improving the properties of the material; under the current density of 30mAg<-1>, the initial charge capacity and the initial discharge capacity of the material are 591.1mAhg<-1> and 1644.4mAhg<-1>, respectively; after 100 charge-discharge cycles under the current density of 3000mAg<-1>, the charge capacity and the discharge capacity are stabilized at 293.2mAhg<-1> and 305.1mAhg<-1>; in short, the preparation method can be widely applied to the electrode materials of the lithium ion batteries.

Template-guided growth of carbon nanotubes using anodized aluminum oxide nanopore templates provides vertically aligned, untangled planarized arrays of multiwall carbon nanotubes with Ohmic back contacts. Growth by catalytic chemical vapor deposition results in multiwall carbon nanotubes with uniform diameters and crystalline quality, but varying lengths. The nanotube lengths can be trimmed to uniform heights above the template surface using ultrasonic cutting, for example. The carbon nanotube site density can be controlled by controlling the catalyst site density. Control of the carbon nanotube site density enables various applications. For example, the highest possible site density is preferred for thermal interface materials, whereas, for field emission, significantly lower site densities are preferable.

Provided is a self-cleaning catalytic chemical vapor deposition apparatus which suppresses the corrosion-induced degradation of a catalytic body by a cleaning gas without heating a catalytic body to not less than 2000° C. and permits practical cleaning rates and good cleaning at low cost. With conductors 5a, 5b which supply a constant current to a catalytic body 4 within a reaction chamber 2 from a heating power supply 6 and terminals 6a, 6b of the heating power supply 6 kept electrically insulated from the reaction chamber 2, a cleaning gas containing halogen elements is introduced into the reaction chamber 2 which has been evacuated, and the catalytic body 4 is heated by the energization from the heating power supply 6. An active species generated by this heating is caused to react with an adhering film which adheres to the interior of the reaction chamber 2, whereby the adhering film is removed. During this removal of the adhering film, a DC bias voltage having an appropriate polarity and an appropriate value is applied from a constant-voltage power supply 8 to the conductor 5b of the heating power supply 6.

The invention discloses a preparation method of a carbon nanotube fiber/polydimethylsiloxane composite conductive elastomer. The method comprises the following steps: 1) ultrasonically mixing ethanol,ferrocene, thiophene and deionized water to obtain a reaction solution, preparing a hollow cylindrical object of the carbon nano tube by a floating catalytic chemical vapor deposition method, performing bundling, filament collecting and air exhaustion, performing twisting operation to obtain carbon nano tube fibers, and drying the carbon nano tube fibers for later use; 2) fully stirring and uniformly mixing polydimethylsiloxane and a curing agent to obtain a mixed solution, vacuumizing the solution, pouring the mixed solution into a culture dish, and drying and preheating the mixed solution;3) dipping the dried carbon nanotube fiber into the preheated mixed solution, adding the mixed solution before preheating, and curing and molding the carbon nanotube fibers in a drying oven to obtaina carbon nanotube fiber/polydimethylsiloxane compound; and 4) performing cutting operation to obtain the carbon nanotube fiber/polydimethylsiloxane composite conductive elastomer. The preparation method is controllable in process and easy to operate, and the prepared finished product has high elasticity and flexibility and also has good electrical conductivity.

The present invention discloses a method for preparing helical structure carbon nanotubes. According to the helical structure carbon nanotubes, a copper-nickel-aluminum composite oxide is adopted as a catalyst, acetylene is adopted as carbon source gas, a mixed gas of hydrogen and nitrogen is adopted as carrier gas, and the helical structure carbon nanotubes are prepared at a temperature of 500-800 DEG C by using a fixed bed catalytic chemical vapor deposition method. The prepared helical structure carbon nanotubes are twisted shape, and have characteristics of regular morphology, uniformity, tube diameter of 100-200 nm, length of 2-10 mum, and purity more than 80%, wherein the yield of the prepared helical structure carbon nanotubes can be 25 times the weight of the catalyst.

The present invention provides a cell culture carrier and a method for cell culture, which are capable of growing multi-layered cells or stably growing cells with a high density. To solve the above described disadvantage, the cell culture carrier of the present invention comprises cup-stacked type carbon nano tubes produced by a catalytic chemical vapor deposition method, a plurality of bottomless cup-shaped carbon layers (graphene sheet) are stacked in each of the cup-stacked type carbon nano tubes, and edges of the stacked carbon layers are exposed.

A process of manufacturing a semiconductor device uses catalytic chemical vapor deposition. In the process, a reaction chamber containing a catalyzer and a substrate has gasses, including silane, ammonia, and hydrogen supplied to the reaction chamber. The gases are brought into contact with the catalyzer and then with the substrate to deposit a silicon nitride film.

The invention discloses a process scheme for growing a carbon nanotube on the surface of a continuous carbon fiber tow through a catalytic chemical vapor deposition method by using a multi-element catalytic system containing a copper component. An implementation method disclosed by the invention comprises the following steps of preparing a catalyst precursor solution taking absolute ethyl alcoholas a solvent by taking copper nitrate and ferric nitrate as necessary options and cobalt nitrate and nickel nitrate as optional options, then feeding surface-activated carbon fibers into the solution,performing dipping for 10-15 minutes, and then performing drying in a drying oven; and feeding the carbon fiber tow with the surface loaded with a catalyst precursor into a tubular furnace, and respectively carrying out reduction of a catalyst and CCVD growth of the carbon nanotube to obtain carbon nanotube-carbon fiber multi-scale reinforcement. According to the method, the carbon nanotube-carbon fiber multi-scale reinforcement with more uniform carbon nanotube distribution and more regular carbon atom arrangement can be obtained, and the interface bonding capability of a carbon fiber composite material can be significantly improved.

A difficulty has been given, that is, in a condition that an electrostatic chuck having an oxide layer as a dielectric layer is set in catalytic chemical vapor deposition apparatus, as a silicon thin film is repeatedly deposited on a workpiece held by the electrostatic chuck, adsorbing power of the electrostatic chuck is gradually decreased, and finally the chuck does not adsorb a substrate at all. Thus, a dielectric layer on a surface of the electrostatic chuck is covered with an insulating film containing silicon nitride or silicon oxide. Thus, since damage to a chuck surface can be prevented, the damage being due to hydrogen radicals generated during depositing the silicon film by the catalytic chemical vapor deposition apparatus, even if the silicon film is repeatedly deposited, power for adsorbing the substrate is not decreased, and consequently substrate temperature is stabilized during depositing the silicon film.