Multilayer thin film electrode, HF transmission line, HF resonator and HF filter

Abstract

A multi-layer thin-film electrode comprises thin conductor films and thin dielectric films each being alternately laminated on a dielectric substrate, in which an electro-magnetic field generated in the dielectric substrate and that generated in each of the thin dielectric films have substantially the same phase at a predetermined frequency. According to the multi-layer thin-film electrode of the present invention, adhesive conductor films that more easily form metallic oxide as compared with the thin conductor films are provided between the dielectric substrate and the thin conductor films adjacent thereto and between each of the thin conductor films and the thin dielectric film adjacent thereto, respectively, and an increase in the surface reactance of the thin conductor films caused by the adhesive conductor film formation is canceled by correcting the thickness of each of the thin dielectric films based on the dielectric constant of the thin dielectric film and the dielectric substrate and the thickness of at least one of the adhesive conductor films.

Description

(1) Technical field [0001] The invention relates to a multilayer film electrode used in high-frequency bands such as microwave, submillimeter wave or millimeter wave. (2) Background technology [0002] Recently, the size of electronic components has been reduced. The size of high-frequency devices used in high-frequency bands such as microwaves, submillimeter waves, or millimeter waves is also reduced by using materials with high dielectric constants. However, when achieving a smaller size by increasing the dielectric constant, there is a disadvantage of energy loss that is inversely proportional to the cube root of the volume. The energy loss of high-frequency devices can be roughly divided into conductor loss due to the skin effect and dielectric loss due to dielectric materials. Recently, dielectric materials with high dielectric constant and low dielectric loss have been put into practical use. Therefore, conductor losses are more dominant than dielectric losses in de...

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Problems solved by technology

[0009] However, such existing multilayer thin-film electrodes have disadvantages of low adhesion strength between the dielectric substrate and its adjacent thin conductive film, and between each thin dielectric film and its adjacent thin conductive film, resulting in low reliability. reduce

Furthermore, in order to improve the adhesive strength between the dielectric substrate and its adjacent thin conductive film, between each thin dielectric film and its adjacent thin conductive film, when an adhesive conductive film is provided between layers, Unsatisfactory suppression of skin effect

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