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Infrared detector, infrared imager and preparation method of infrared detector

An infrared detector and infrared radiation technology, applied in the field of infrared detection, can solve the problems of high preparation cost of infrared absorbing materials, limited preparation size of infrared absorbing materials, and complicated preparation process, so as to reduce preparation complexity, reduce preparation cost, and improve The effect of system performance

Pending Publication Date: 2020-11-10
合肥的卢深视科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

These devices have good performance, but their chip materials need to be realized with complex epitaxy technology, which is costly
For example, the infrared absorption materials of quantum well infrared detectors or epitaxial quantum dot infrared detection devices need to be prepared and synthesized by complex techniques such as molecular beam epitaxy or chemical vapor deposition, and the preparation process is complicated; moreover, molecular beam epitaxy also requires an ultra-high vacuum environment , leading to very high preparation costs of this kind of infrared absorbing material; in addition, due to the limitation of epitaxial equipment, the preparation size of this kind of infrared absorbing material is relatively limited, and the adjustability of its detectable wavelength is poor

Method used

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  • Infrared detector, infrared imager and preparation method of infrared detector
  • Infrared detector, infrared imager and preparation method of infrared detector
  • Infrared detector, infrared imager and preparation method of infrared detector

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preparation example Construction

[0075] Based on the same inventive concept, another embodiment of the present invention also provides a method for preparing an infrared detector, Figure 7 A flow chart of an infrared detector preparation method provided by an embodiment of the present invention, such as Figure 7 Shown, described preparation method comprises:

[0076] Step S701: preparing a substrate layer;

[0077] In this step, the material parts of the substrate layer can be cleaned by wet cleaning and drying or plasma cleaning, and the material parts of the substrate layer can be processed with an optical structure or coated with an optical film to enhance the infrared detector. The ability to absorb infrared radiation further forms a substrate layer that can transmit infrared radiation in a predetermined infrared radiation band.

[0078] Step S702: Prepare at least one stacked structure from bottom to top above the substrate layer, and prepare a top layer electrode layer on the surface of the uppermos...

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Abstract

The embodiment of the invention discloses an infrared detector, an infrared imager and a preparation method of the infrared detector. The infrared detector comprises at least one pixel, and the pixelcomprises a substrate layer, at least one laminated structure and a top electrode layer which are sequentially arranged from bottom to top; the laminated structure comprises an electrode layer and a quantum dot infrared absorption layer which are sequentially arranged from bottom to top; the quantum dot infrared absorption layer comprises a preset number of colloid quantum dots and is used for detecting infrared radiation; the wavelengths of infrared radiation detected by the quantum dot infrared absorption layers in different laminated structures are different. The infrared detector is simplein preparation process and low in cost; in addition, the wavelengths of infrared radiation detected by the quantum dot infrared absorption layers in different laminated structures are different, so infrared detection materials with different detection wavelengths are integrated on the same substrate structure, the detection range of the infrared detector can be better expanded, and the system performance is improved.

Description

technical field [0001] The invention relates to the technical field of infrared detection, in particular to an infrared detector, an infrared imager and a preparation method of the infrared detector. Background technique [0002] Infrared detection and imaging technology was mainly used in the military field in the early days. With the continuous advancement of industry technology, the application scope of infrared detection and imaging technology has gradually expanded to the civilian field, and the development speed has accelerated. Infrared detectors can be divided into cooled photon detectors and uncooled photon detectors. There are two types of heat detectors. At this stage, the research work of infrared detectors in my country has developed from units and lines to infrared focal planes, and the product coverage has continued to expand, gradually forming a relatively complete infrared detector research and production system. [0003] Commonly used uncooled infrared det...

Claims

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Application Information

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IPC IPC(8): H01L31/0352H01L31/108H01L31/18H01L27/146
CPCH01L27/14652H01L31/035218H01L31/1085H01L31/18Y02P70/50
Inventor 褚沁蓉户磊
Owner 合肥的卢深视科技有限公司
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