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Method for improving graphite boat treatment effect

A treatment effect, graphite boat technology, applied in gaseous chemical plating, coating, electrical components, etc., can solve the problem of insufficient cleaning effect of graphite boat, and achieve the effect of improving washing effect, improving cleaning effect, and improving cleaning efficiency.

Inactive Publication Date: 2020-11-20
无锡鼎桥新能源科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Aiming at the deficiencies in the prior art, the present invention provides a method for improving the treatment effect of the graphite boat, mainly to solve the problem that the cleaning effect of the graphite boat by the existing method is not good enough

Method used

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  • Method for improving graphite boat treatment effect

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Experimental program
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Effect test

Embodiment 1

[0034] refer to figure 1 , a method for improving graphite boat treatment effect, comprising the following steps:

[0035] S1: Disassembly: Prepare the graphite boat that needs to be cleaned, disassemble it, and clean the graphite boat and process stuck points separately;

[0036] S2: Dosing: configure a hydrofluoric acid solution with a concentration of 7% to 15% in the cleaning tank;

[0037] S3: Cleaning: Put the graphite boat as a whole into the prepared hydrofluoric acid solution, soak for 5-7 hours, and start bubbling while soaking;

[0038] S4: pumping liquid: after the whole graphite boat is soaked for 5-7 hours, pump out the hydrofluoric acid solution in the above steps;

[0039] S5: Spray: Spray the soaked graphite boat with deionized water, and set the spray time to 5-15 minutes;

[0040] S6: Washing and bubbling: use deionized water to bubble the sprayed graphite boat as a whole;

[0041] S7: Purge inspection: Use an air gun to purge the surface of the graphite...

Embodiment 2

[0046] refer to figure 1 , a method for improving graphite boat treatment effect, comprising the following steps:

[0047] S1: Disassembly: Prepare the graphite boat that needs to be cleaned, disassemble it, and clean the graphite boat and process stuck points separately;

[0048] S2: Dosing: configure a hydrofluoric acid solution with a concentration of 9% to 15% in the cleaning tank;

[0049] S3: Cleaning: Put the graphite boat as a whole into the prepared hydrofluoric acid solution, soak for 5-7 hours, and start bubbling while soaking;

[0050] S4: pumping liquid: after the whole graphite boat is soaked for 5-7 hours, pump out the hydrofluoric acid solution in the above steps;

[0051] S5: Spray: Spray the soaked graphite boat with deionized water, and set the spray time to 5-15 minutes;

[0052] S6: Washing and bubbling: use deionized water to bubble the sprayed graphite boat as a whole;

[0053] S7: Purge inspection: Use an air gun to purge the surface of the graphite b...

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Abstract

The invention relates to the technical field of treatment of graphite boats, and discloses a method for improving the graphite boat treatment effect. The method comprises the following steps of S1, disassembly, wherein a graphite boat which needs to be cleaned is prepared and disassembled, and the graphite boat and clamping pieces are cleaned respectively; S2, solution preparation, wherein a hydrofluoric acid solution with the concentration of 7-15% is prepared in a cleaning tank; S3, cleaning, wherein the whole graphite boat is placed into the prepared hydrofluoric acid solution and soaked for 5-7 hours, and bubbling is started while soaking; S4, pump-out of the solution, wherein after the whole graphite boat is soaked for 5-7 hours, the hydrofluoric acid solution in the previous step ispumped out. By means of the method, it can be ensured that each face can be effectively sprayed and cleaned, the cleaning effect is improved, and the situation can be prevented that there are water drops on the surface of the graphite boat during drying, due to the residues obtained after drying, normal use of the graphite boat is affected; due to the checking step, the graphite boat which is notwell cleaned can be prevented from being used again, and the cleaning effect is improved.

Description

technical field [0001] The invention relates to the technical field of graphite boat treatment, in particular to a method for improving the treatment effect of a graphite boat. Background technique [0002] With the continuous development of photovoltaic technology, crystalline silicon solar cells have developed rapidly as a clean energy product that converts solar energy into electrical energy. With the continuous development of PECVD (Plasma Enhanced Chemical Vapor Deposition, which is a process in the process of making solar cells), the original plate PECVD has been transformed into a tubular PECVD. Deposit a dark blue SiNx film. [0003] When the graphite boat runs for a certain number of times, a very thick silicon nitride is deposited on the surface, which affects the contact between the boat wall and the silicon wafer, thereby affecting the quality of the coating film and causing serious chromatic aberration of the battery sheet. Therefore, it is necessary to carry o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/44C23C16/34H01L31/18
CPCC23C16/4407C23C16/4405C23C16/345H01L31/1804Y02P70/50
Inventor 吴寅何军
Owner 无锡鼎桥新能源科技有限公司
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