Artificial bionic compound eye preparation method based on atmospheric pressure cold plasma micromachining
A technology of cold plasma and bionic compound eyes, which is applied in the field of optical bionics, can solve the problems of high cost, complicated preparation process, and reduced replication accuracy, and achieve the effects of reducing processing costs, reducing process steps, and improving replication accuracy
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[0033] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
[0034] refer to figure 1 As shown, it is a process flow chart of an artificial bionic compound eye preparation method based on atmospheric pressure cooling plasma micromachining in a preferred embodiment of the present invention, including the following steps in the figure:
[0035] S1: Spin-coat a layer of photoresist 2 on the substrate 1, and prepare a photoresist 2 layer with a certain thickness on the substrate 1. As a preferred manner, the substrate 1 can be a silicon substrate, and the phot...
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