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Artificial bionic compound eye preparation method based on atmospheric pressure cold plasma micromachining

A technology of cold plasma and bionic compound eyes, which is applied in the field of optical bionics, can solve the problems of high cost, complicated preparation process, and reduced replication accuracy, and achieve the effects of reducing processing costs, reducing process steps, and improving replication accuracy

Inactive Publication Date: 2020-11-20
SHANGHAI JIAO TONG UNIV
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Problems solved by technology

The formation method of this patent requires two mold inversions, the replication accuracy will be slightly reduced, the preparation process is complicated, and the cost is high

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  • Artificial bionic compound eye preparation method based on atmospheric pressure cold plasma micromachining
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  • Artificial bionic compound eye preparation method based on atmospheric pressure cold plasma micromachining

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Embodiment Construction

[0033] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0034] refer to figure 1 As shown, it is a process flow chart of an artificial bionic compound eye preparation method based on atmospheric pressure cooling plasma micromachining in a preferred embodiment of the present invention, including the following steps in the figure:

[0035] S1: Spin-coat a layer of photoresist 2 on the substrate 1, and prepare a photoresist 2 layer with a certain thickness on the substrate 1. As a preferred manner, the substrate 1 can be a silicon substrate, and the phot...

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Abstract

The invention provides an artificial bionic compound eye preparation method based on atmospheric pressure cold plasma micromachining. The artificial bionic compound eye preparation method comprises the following steps of spin-coating a layer of photoresist on a substrate, etching the photoresist by adopting atmospheric pressure cold plasma jet, and obtaining a planar concave array structure on thephotoresist after etching, preparing a demolding isolation layer on the upper surface of the planar concave array structure obtained after etching, spin-coating a layer of optical transparent material on the isolation layer, and curing the optical transparent material to form a transparent film, and stripping the cured transparent film to obtain the compound eye lens with the planar convex arraystructure. According to the method, a mask plate is not needed, and the artificial bionic compound eye structure can be obtained through hot-pressing deformation after one-time mold reversing; compared with a traditional micro-lens machining process, the method has the advantages of simple process, low cost, high copying precision and the like.

Description

technical field [0001] The invention relates to the field of optical bionics, in particular to an artificial bionic compound eye preparation method based on atmospheric pressure cooling plasma micromachining. Background technique [0002] Insect compound eyes in nature have the characteristics of small size, wide field of view and high sensitivity. The artificial bionic compound eye developed based on animal compound eyes has potential application in large field of view monitoring, fast target tracking and missile guidance. In recent years, with the development of micro-nano processing technology, femtosecond laser and thermal reflow are mostly used in the preparation of compound eyes. [0003] Among them, Liu H et al. described the method of femtosecond laser processing artificial bionic fly-eye lens in "Fabrication of bioinspired omnidirectional and gapless microlens array for wide field-of-view detections" Applied Physics Letters, 100(13), 133701(2012), It can be seen t...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B3/00
CPCG02B3/0031G02B3/0056
Inventor 杨斌韩晴晴翟玥琦刘景全
Owner SHANGHAI JIAO TONG UNIV
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