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Waveform data processing method for frequency measurement test of SC cut type quartz wafer online grinding

A quartz wafer and frequency measurement technology, which is applied in the direction of measuring devices, measuring electrical variables, frequency measuring devices, etc., can solve problems such as low repeatability, wrong frequency judgment, unstable shutdown frequency, etc., to achieve accurate data and perfect processing process Effect

Active Publication Date: 2021-01-01
RES INST OF ZHEJIANG UNIV TAIZHOU
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] 1. The resonant frequency obtained by automatic frequency search cannot be confirmed as the resonant frequency of B-mode or C-mode
2. Even if the current measurement and control instrument detects the correct C-mode frequency and stably tracks and shuts down, but we cannot get the B-mode frequency, the user still cannot confirm whether the final frequency obtained by grinding is correct
3. During the automatic frequency search process of the currently used frequency measuring instrument, since only one frequency value is searched, it is impossible to confirm whether it is a B-mode frequency or a C-mode frequency.
At the same time, the current SC-cut quartz wafer needs to be frequency confirmed after grinding, and the frequency confirmation of B-mode and C-mode can only be performed through a network analyzer or other frequency measurement devices, but cannot be confirmed when it is in the grinding machine
[0008] Based on the above reasons, the current grinding process of SC-cut quartz wafers is basically based on the number of turns to judge the thickness and stop the control, and then use the network analyzer or other frequency measurement devices to confirm the frequency. This method will cause the stop frequency to be extremely high Stable, low repeatability, and there is a possibility of frequency judgment error

Method used

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  • Waveform data processing method for frequency measurement test of SC cut type quartz wafer online grinding
  • Waveform data processing method for frequency measurement test of SC cut type quartz wafer online grinding
  • Waveform data processing method for frequency measurement test of SC cut type quartz wafer online grinding

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Experimental program
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Effect test

Embodiment 1

[0059] like Figures 1 to 6 As shown, a waveform data processing method for frequency measurement test of SC-cut quartz wafer online grinding, including single frequency sweep double resonance frequency waveform matching function, single frequency sweep resonance frequency data processing function, and data processing function per unit time ; It specifically provides a frequency measurement test method in a grinding machine. When the quartz wafer is in the grinding machine, the user can manually set the frequency sweep parameters and frequency measurement parameters, and realize the measurement of the dual resonance frequency of the quartz wafer in the grinding machine through the frequency measurement test function, and count the measured resonance frequency per unit time. Number of times, statistics of B-mode and C-mode resonant linewidth, sweep frequency amplitude, standard deviation, etc. Users can use these information to judge whether the resonance waveform is normal, a...

Embodiment 2

[0118] Such as Figure 1 to Figure 17 As shown, the SC-cut quartz wafer online grinding frequency measurement system has the following functions:

[0119] 1. During the grinding process, it can automatically search for the B-mode frequency and C-mode frequency of the quartz wafer, and confirm whether the searched frequency is the B-mode frequency or the C-mode frequency according to the proportional relationship.

[0120] 2. During the tracking frequency measurement process, it can track the B-mode frequency and C-mode frequency in real time, and provide corresponding statistics in real time, such as the number of quartz wafers measured in one circle, the dispersion of a single chip, the dispersion of the whole disk, and the grinding rate, etc. information, and simultaneously display the change curve of the resonant frequency of the wafer and the change curve of the dispersion difference during the grinding process, and the user can judge the incoming material of the wafer and...

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Abstract

The invention discloses a frequency measurement test system for SC cut quartz wafer online grinding. The frequency measurement test system comprises a single-time frequency sweeping double-resonant-frequency waveform matching function, a single-time frequency sweeping resonant frequency data processing function and a data processing function in unit time. The frequency measurement test system forSC cut type quartz wafer online grinding is high in processing efficiency, high in data precision and accurate in dual-mode frequency distinguishment, and is convenient to operate.

Description

technical field [0001] The invention relates to the field of quartz wafers, more specifically, it relates to an SC-cut quartz wafer on-line grinding frequency measurement system. Background technique [0002] The core components of crystal oscillators (active crystal oscillator, oscillator) and crystal resonators (passive crystal oscillator, crystal) are quartz wafers. The design of quartz wafers largely determines the performance of oscillators and resonators. The material of the quartz wafer is a quartz rod (quartz). Due to the anisotropy of the crystal, the quartz wafer cut from different directions of the quartz rod has completely different effects. The cutting method of the quartz rod determines the elasticity of the quartz wafer. Constant, dielectric constant, expansion coefficient, temperature characteristics, etc., such as frequency temperature coefficient, frequency thickness coefficient, stress compensation coefficient, etc. The difference in these characteristics ...

Claims

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Application Information

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IPC IPC(8): G01R23/02G01R29/027G01R29/033
CPCG01R23/02G01R29/027G01R29/0273G01R29/033
Inventor 陈浙泊潘凌锋郭彬陈一信林建宇余建安陈镇元叶雪旺颜文俊林斌吴荻苇
Owner RES INST OF ZHEJIANG UNIV TAIZHOU