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co 2 Laser anti-reflection film and preparation method thereof

An anti-reflection coating and laser technology, applied in optics, optical components, instruments, etc., can solve the problem of low laser damage threshold of laser optical components, affecting the transmittance and service life of laser anti-reflection coatings, poor anti-laser damage threshold, etc. question

Active Publication Date: 2022-05-27
安徽中飞科技有限公司
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AI Technical Summary

Problems solved by technology

Defects in the film layer are often the main reason for the low laser damage threshold of laser optical components
The difference in resistance to laser damage threshold is the current CO 2 The ubiquitous deficiencies of laser anti-reflection coatings will affect CO 2 Transmittance and service life of laser anti-reflection coating

Method used

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  • co <sub>2</sub> Laser anti-reflection film and preparation method thereof
  • co <sub>2</sub> Laser anti-reflection film and preparation method thereof
  • co <sub>2</sub> Laser anti-reflection film and preparation method thereof

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preparation example Construction

[0043] CO according to the present disclosure 2 The preparation method of laser antireflection coating is used to prepare CO 2 Laser AR Coating for CO Reduction 2 The possibility of coating defects caused by laser anti-reflection coatings during coating. CO 2 The preparation method of the laser antireflection film includes the steps of: placing the base layer 1 to be coated in a vacuum chamber, and the pressure in the vacuum chamber is 1.0×10 -3 Pa-3.0×10 -3 Pa, under the conditions that the baking temperature is 100°C-150°C and the constant temperature time is 10-30min, the first ytterbium fluoride layer 2 and the first sulfide layer 2 are sequentially deposited on the surface of the base layer 1 along the thickness direction T of the base layer 1 Zinc layer 3 , second ytterbium fluoride layer 4 and second zinc sulfide layer 5 .

[0044] Specifically, the first ytterbium fluoride layer 2 , the first zinc sulfide layer 3 , the second ytterbium fluoride layer 4 and the sec...

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Abstract

The present disclosure provides a CO 2 Laser anti-reflection film and preparation method thereof, the CO 2 The laser anti-reflection coating is composed of a base layer, a first ytterbium fluoride layer, a first zinc sulfide layer, a second ytterbium fluoride layer and a second zinc sulfide layer, on the surface of the base layer along the thickness direction of the base layer The first ytterbium fluoride layer, the first zinc sulfide layer, the second ytterbium fluoride layer and the second zinc sulfide layer are arranged in sequence; the film thickness of the first ytterbium fluoride layer and the second fluoride The sum of the film thickness of the ytterbium oxide layer is greater than the sum of the film thickness of the first zinc sulfide layer and the film thickness of the second zinc sulfide layer. Therefore, through the design of the membrane structure, the CO 2 When the laser anti-reflection coating is used, its own heat generation is low and at the same time it achieves high transmittance to improve CO 2 The service life of the laser anti-reflection coating.

Description

technical field [0001] The present disclosure relates to the field of laser antireflection coatings, and in particular to a CO 2 Laser antireflection coating and preparation method thereof. Background technique [0002] Currently, CO 2 Laser technology has been widely used in industry, material processing, medical, military and high-tech fields. This is mainly because of CO 2 Lasers have the outstanding advantage of large transmission power, and the increase of laser power is limited by the destruction threshold of laser optical elements such as optical thin films. Therefore, improving the laser damage threshold of optical thin films is the key to achieve higher output power of laser systems. [0003] Optical films especially CO 2 Laser AR Coatings at High Power CO 2 The laser optical system plays an important role in transmitting laser light. Its anti-laser damage ability directly affects the output energy and power of the laser, and is a key component of the laser s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B1/115C23C14/06C23C14/24
CPCG02B1/115C23C14/24C23C14/0694C23C14/0629
Inventor 尹士平刘克武郭晨光
Owner 安徽中飞科技有限公司
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