Preparation method of silicon carbide powder and silicon carbide powder
A silicon carbide powder, silicon powder technology, applied in chemical instruments and methods, carbon compounds, inorganic chemistry, etc., can solve the problems of limited mixture uniformity, long mixing time, and low mixture density, etc., and achieve high bulk density. , The effect of increasing single output and reducing production cost
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[0020] The invention provides a kind of preparation method of silicon carbide powder, mainly comprises the following steps:
[0021] S1. Mix silicon powder and graphite powder once, and then carry out vacuum melting and gas atomization treatment to form spherical and / or subspherical powders, wherein the melting temperature is 1500-1600°C;
[0022] S2. Put the powder obtained in step S1 into a graphite crucible, put it into a reaction chamber, and perform a heating synthesis reaction to obtain silicon carbide powder.
[0023] The present invention uses vacuum smelting gas atomization to process the raw materials of silicon powder and graphite powder, so that the raw materials form a solid-liquid mixture after smelting, and the solid-liquid mixture is quickly atomized and solidified, thereby obtaining spherical and / or sub-spherical powders of silicon-wrapped graphite powder , which shortens the mixing time of raw materials; and the bulk density of spherical and / or sub-spherical ...
Embodiment 1
[0038] (1) Weigh 2.55Kg of polysilicon powder (purity 9N, 99.9999999%) and graphite powder (purity 5N, 99.999%) 1.08Kg, put them into a three-dimensional mixer and mix for 1 hour;
[0039] (2) Transfer the powder obtained in step (1) to the smelting device of the production equipment for preparing powder materials by vacuum smelting gas atomization, evacuate, introduce protective atmosphere Ar gas, and heat to 1550 ° C, keep it warm for 10 minutes, and then inert The gas Ar is an aerosolization gas to rapidly atomize the solid-liquid mixture to form solid-liquid droplets, which are solidified into spherical and / or sub-spherical powders in the collection chamber, with a particle size of 120 um;
[0040] (3) Collect the powder prepared in the cabin, and then mix it with a three-dimensional mixer for 5 hours;
[0041] (4) Fill the graphite crucible after mixing, transfer to the reaction chamber, seal the reaction chamber, control the temperature at 900°C, and use a vacuum pump to...
Embodiment 2
[0044] According to the method of Example 1, the difference is that the graphite powder in step (1) is 1.04Kg.
[0045] Silicon carbide powder A2 is α-phase silicon carbide; particle size D50 is 515um; GDMS metal impurity ion content is about 7.8ppm.
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