Harmonic oscillator film thickness distribution and uniformity correction method

Abstract

The invention relates to a harmonic oscillator film thickness distribution and uniformity correction method and a hemispherical harmonic oscillator manufacturing method. The harmonic oscillator film thickness distribution and uniformity correction method comprises the following steps of acquiring three-dimensional data of coating equipment and coating workpieces; establishing a three-dimensional model of the coating workpieces and effective coating areas according to the acquired three-dimensional data, and dividing grids for the to-be-coated coating faces of the coating workpieces along the radial direction; utilizing finite element simulation to obtain film thickness distribution and uniformity degree data of the coating workpieces, namely the hemispherical harmonic oscillators, corresponding to different process parameters on the coating surfaces; and in the coating process, coating thickness parameters are acquired, the thickness distribution and the uniformity degree of film layers are dynamically analyzed, the coating process parameters are corrected according to obtained thickness and uniformity degree results of the film layers, and therefore the thickness distribution uniformity degree of the film layers is continuously improved. According to the harmonic oscillator film thickness distribution and uniformity correction method and the hemispherical harmonic oscillator manufacturing method, uniform coating required by the hemispherical harmonic oscillators can be rapidly realized, and the product quality in the actual coating process is improved.

Description

technical field [0001] The invention relates to the technical field of hemispherical resonant gyroscopes, in particular to a method for correcting the film layer thickness distribution and uniformity of a resonator, and a method for manufacturing a hemispherical resonator. Background technique [0002] Hemispherical Resonator Gyro (Hemispherical Resonator Gyro, referred to as HRG) is a kind of high-precision gyroscope with inertial navigation performance in the Columbia vibratory gyroscope. It has been widely used in aerospace, ships, weapons and other fields in recent years. Guidance, carrier attitude stability control, inertial measurement and other units are very important components. [0003] Metallized coating on the surface of the resonator is an important process in the manufacture of hemispherical resonators. The resonator is made of quartz glass with high Q value through ultra-precision processing. Because the hemispherical resonator gyro relies on the resonator to...

AI Technical Summary

Problems solved by technology

The thickness and uniformity of the metallized film layer on the surface of the resonator have an important impact on the Q value and frequency difference of the resonator. If the metallized film layer is not uniform, the Q value of the resonator will decrease and the frequency difference will increase. , which directly affects the performance of the harmonic osc

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