All-dielectric transmission type efficient ultrathin beam splitter and preparation method and application thereof

A transmissive, all-dielectric technology, applied in instruments, light guides, optics, etc., can solve the problems of difficult preparation and insufficient efficiency, and achieve the effects of simple preparation, low time cost, and wide source of raw materials

Pending Publication Date: 2021-03-26
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
View PDF2 Cites 5 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But it needs to use 700nm thick material, which is very difficult to prepare
In the same year, Zhang Xingliang and others proposed a reflective beam splitter based on metal-dielectric-metal, which can split a single-frequency, single-polarized incident light into two beams of outgoing l

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • All-dielectric transmission type efficient ultrathin beam splitter and preparation method and application thereof
  • All-dielectric transmission type efficient ultrathin beam splitter and preparation method and application thereof
  • All-dielectric transmission type efficient ultrathin beam splitter and preparation method and application thereof

Examples

Experimental program
Comparison scheme
Effect test

preparation example Construction

[0051] Another aspect of the embodiments of the present invention provides a method for preparing the aforementioned full-dielectric transmission type high-efficiency ultra-thin beam splitter, which includes: a transparent medium substrate;

[0052] A dielectric functional layer is arranged on the substrate, and a periodic nano-column array structure is formed in the dielectric functional layer. Further, the preparation method includes: forming the dielectric functional layer on the substrate by using pulsed laser deposition technology.

[0053] Further, the preparation method includes: coating a photoresist on the dielectric functional layer, and engraving a periodic array photoresist structure by electron beam exposure technology, and then engraving the dielectric functional layer by using inductively coupled plasma technology. etch, pattern it, and remove the remaining photoresist on the dielectric functional layer, thereby processing the periodic nano-column array structur...

Embodiment 1

[0061] see figure 1 As shown, an all-dielectric transmission type high-efficiency ultra-thin beam splitter in this embodiment includes an aluminum boron nitrogen nanopillar array structure 1 formed by alternating arrangement of aluminum boron nitrogen nanopillars with designed diameters in an "AABB" manner. Silicon substrate 2. A beam of visible light (450nm-760nm) is vertically incident on the full-dielectric transmission type high-efficiency ultra-thin beam splitter from directly below the bottom of the device, and is efficiently transmitted into two beams of the same visible light. The frequency and polarization direction of the light do not change, that is It is a full-dielectric transmission type high-efficiency ultra-thin beam splitter.

[0062] see figure 2, is a three-dimensional schematic diagram of the unit structure constituting the all-dielectric transmission type high-efficiency ultra-thin beam splitter of this embodiment; it includes an aluminum boron nitrogen...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
Thicknessaaaaaaaaaa
Diameteraaaaaaaaaa
Diameteraaaaaaaaaa
Login to view more

Abstract

The invention discloses an all-dielectric transmission type efficient ultrathin beam splitter and a preparation method and application thereof. A beam splitter comprises a plurality of structural unitarrays, wherein each structural unit comprises: a substrate made of a transparent dielectric material; a dielectric functional layer which is made of a high-refractive-index transparent dielectric material, is arranged on the substrate and comprises a periodic nano-pillar array structure that comprises a limited number of pillars which are periodically and alternately arranged and have differentdiameters, wherein the arrangement rule of the limited number of cylinders with relatively large diameters and the limited number of cylinders with relatively small diameters conforms to the generalized Snell's Law. The beam splitter has excellent beam splitting performance, can split normally incident visible light into two beams of emergent light, and has the advantages of being high in transmission efficiency, wide in wave band, ultrathin, light, easy to integrate, low in power consumption, low in cost and relatively easy to manufacture. The beam splitter has application prospects in the fields such as an optical sensing system, a nanometer photonic device and an integrated optical system.

Description

technical field [0001] The invention relates to a beam splitter, in particular to a full-dielectric transmission type high-efficiency ultra-thin beam splitter and its preparation method and application, belonging to the technical field of optical element preparation. Background technique [0002] A beam splitter is an optical component that splits a light beam into two or more, and is widely used in photonic circuit systems, optical display systems, and optical processing systems. The most common beamsplitter is a cube beamsplitter made from two triangular glass prisms glued together on a substrate using polyester, epoxy, or polyurethane-based adhesives. The thickness of the resin layer is adjusted so that half of the light (of a certain wavelength) incident through one "port" (ie, the face of the cube) is reflected and the other half is transmitted on due to total internal reflection. Polarizing beam splitters, such as Wollaston prisms, use birefringent materials to split ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G02B6/12
CPCG02B6/12G02B6/12004G02B2006/1215G02B2006/12176
Inventor 林雨蒋春萍刘峰峰李玉雄隋展鹏赵永旻
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap