The invention provides a large-diameter plane optical element defect three-dimensional fast dark field detection device and method. The detection device comprises an illuminating light source, a polarizer, a collimating lens system, a one-dimensional electronic control light source adjusting support supporting system, a prism, a to-be-detected large-diameter plane optical element, a one-dimensional electronic control horizontal movement object support, a polarization analyzer, an imaging lens, a CCD, a computer and a box. Coordinate transformation is achieved through the Snell law, defect (or damage) position detection in the z axis direction can be achieved, and the problem that in the prior art, deep detection of the defect (or damage) in the optical element cannot be performed; detection speed is greatly increased, the device and method can be more effective for the large-diameter optical element, and the problem that in the prior art, time consumed during detection of the large-diameter optical element is long is effectively solved.