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Cleaning method for removing metal oxide deposited on surface of ceramic

A ceramic surface and oxide technology, applied in discharge tubes, electrical components, circuits, etc., can solve the problems of reducing the frequency of use of ceramic parts, increasing the cost of use by customers, and large loss of ceramic parts, so as to prolong and reduce the single use time. Particulate pollutants, the effect of increasing the number of times of use

Pending Publication Date: 2021-03-26
富乐德科技发展(天津)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The traditional cleaning method for ceramic parts in etching equipment is to use only chemical immersion for cleaning. This method has a single process and is easy to operate, but it cannot completely remove the deposited pollutants in the micropores on the surface of ceramic parts. It has higher requirements for particle pollutants The etching chamber cannot meet the requirements of use, and only a single chemical cleaning process is used, which causes a lot of loss to the ceramic parts, reduces the number of times the ceramic parts are used, and increases the customer's use cost

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0079] A cleaning method for removing metal oxides deposited on ceramic surfaces, the steps are as follows:

[0080] (1) Incoming cargo inspection

[0081] Conduct surface inspection on the ceramic parts to be cleaned to confirm whether there is any defect on the surface;

[0082] (2) Immersion in pure water

[0083] Immerse the ceramic parts to be cleaned in pure water for more than 30 minutes;

[0084] (3) Wipe with scouring pad

[0085] Use a 400-mesh scouring pad to thoroughly scrub the ceramic parts in pure water to remove loose deposits on the surface;

[0086] (4) Rinse with pure water

[0087] Taking out the ceramic parts treated in step (3), and using a water gun to fully rinse the ceramic parts;

[0088] (5) soaking in isopropanol (IPA)

[0089] Immerse the rinsed ceramic parts in pure IPA liquid for more than 10 minutes, take out the ceramic parts, use a water gun to fully rinse the ceramic parts, and then use an air gun to blow off the moisture on the surface...

Embodiment 2

[0109] A cleaning method for removing metal oxides deposited on ceramic surfaces, the steps are as follows:

[0110] (1) Incoming cargo inspection

[0111] Conduct surface inspection on the ceramic parts to be cleaned to confirm whether there is any defect on the surface;

[0112] (2) Immersion in pure water

[0113] Immerse the ceramic parts to be cleaned in pure water for more than 30 minutes;

[0114] (3) Wipe with scouring pad

[0115] Use a 400-mesh scouring pad to thoroughly scrub the ceramic parts in pure water to remove loose deposits on the surface;

[0116] (4) Rinse with pure water

[0117] Taking out the ceramic parts treated in step (3), and using a water gun to fully rinse the ceramic parts;

[0118] (5) soaking in isopropanol (IPA)

[0119] Immerse the rinsed ceramic parts in pure IPA liquid for more than 10 minutes, take out the ceramic parts, use a water gun to fully rinse the ceramic parts, and then use an air gun to blow off the moisture on the surface...

Embodiment 3

[0139] A cleaning method for removing metal oxides deposited on ceramic surfaces, the steps are as follows:

[0140] (1) Incoming cargo inspection

[0141] Conduct surface inspection on the ceramic parts to be cleaned to confirm whether there is any defect on the surface;

[0142] (2) Immersion in pure water

[0143] Immerse the ceramic parts to be cleaned in pure water for more than 30 minutes;

[0144] (3) Wipe with scouring pad

[0145] Use a 400-mesh scouring pad to thoroughly scrub the ceramic parts in pure water to remove loose deposits on the surface;

[0146] (4) Rinse with pure water

[0147] Taking out the ceramic parts treated in step (3), and using a water gun to fully rinse the ceramic parts;

[0148] (5) soaking in isopropanol (IPA)

[0149] Immerse the rinsed ceramic parts in pure IPA liquid for more than 10 minutes, take out the ceramic parts, use a water gun to fully rinse the ceramic parts, and then use an air gun to blow off the moisture on the surface...

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Abstract

The invention relates to a cleaning method for removing metal oxide deposited on the surface of ceramic. The cleaning method comprises the following steps: incoming inspection; soaking in pure water;wiping with scouring pads; washing with pure water; soaking in isopropanol; surface sand blasting; cleaning with potassium hydroxide and hydrogen peroxide; cleaning with nitric acid and hydrofluoric acid; soaking in pure water; baking at high temperature; washing under high pressure; ultrasonic cleaning; nitrogen purging; and drying. Aluminum oxide sand blasting treatment is adopted, the roughnessof the surface of a ceramic component is improved, the sediment adsorption capacity is improved, permeation pollutants in micropores of the ceramic component can be cut off easily through a high-temperature baking process, the surface of the ceramic component is cleaned through ultrasonic cleaning and nitrogen, and particle pollutants on the surface of the ceramic component are greatly reduced. Particle pollutants and deposited pollutants on the surface of the ceramic part and in micropores can be completely removed, the single use time of the ceramic part is doubled, the use frequency of theceramic part is increased, and the use cost of customers is reduced.

Description

technical field [0001] The invention relates to the technical field of cleaning precision spare parts of semiconductor equipment, in particular to a cleaning method for removing metal oxides deposited on ceramic surfaces. Background technique [0002] The core spare parts of the etching process chamber in semiconductor process equipment and optoelectronic process equipment are easy to deposit metal oxide on the surface of ceramic parts during use, and need to be cleaned and regenerated regularly. The traditional cleaning method for ceramic parts in etching equipment is to use only chemical immersion for cleaning. This method has a single process and is easy to operate, but it cannot completely remove the deposited pollutants in the micropores on the surface of ceramic parts. It has higher requirements for particle pollutants The etching chamber cannot meet the requirements of use, and only a single chemical cleaning process is used, which causes a lot of loss to the ceramic ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/32
CPCH01J37/32862
Inventor 穆帅帅张代龙马有杰贺贤汉
Owner 富乐德科技发展(天津)有限公司
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