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Roll-to-roll conveying synchronous control structure of CIGS co-evaporation method

A synchronous control, roll-to-roll technology, applied in final product manufacturing, vacuum evaporation coating, sustainable manufacturing/processing, etc., can solve problems such as difficulty in finding in time, conveying rollers affecting coating quality, etc.

Active Publication Date: 2021-04-16
ZHEJIANG SHANGYUE OPTOELECTRONICS TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the roll-to-roll production of CIGS co-steaming method is transported by conveying rollers. In a non-visible production environment of high temperature and high corrosion, the abnormality of the conveying rollers will affect the quality of the coating film, and it is difficult to find out in time. Provide a A CIGS co-steaming roll-to-roll conveying synchronous control structure can monitor the rotation status of each conveying roller in real time to ensure that the conveying rollers are in a synchronous state

Method used

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Embodiment

[0023] Embodiment: a kind of roll-to-roll transport synchronous control structure of CIGS co-steaming method, such as figure 1 shown. The device includes a vacuum chamber 1, and an unwinding shaft 2 and a winding shaft 4 are arranged in the vacuum chamber. The unwinding shaft 2 is connected with an independently controllable unwinding servo motor 3, and the winding shaft 4 is connected with an independently adjustable winding servo motor. Motor 5. Between the unwinding shaft 2 and the winding shaft 4, the base coil 6 is retracted and transported. Several conveying rollers 7 are arranged between the unwinding shaft 2 and the winding shaft 4 , and the conveying rollers 7 are the conveying tracks of the base coil 6 . The evaporation source 9 and the quality control sensor 10 of the CIGS co-evaporation evaporation method and the quality control sensor 10 are arranged below the middle section of the substrate coil 6. The quality control sensor 10 includes a temperature sensor, a ...

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Abstract

The invention relates to a roll-to-roll conveying synchronous control structure of a CIGS (copper indium gallium selenide) co-evaporation method, and solves the problems that the abnormity of a conveying roller can influence the coating quality and is difficult to find in time when a CIGS co-evaporation method roll is in a high-temperature and high-corrosion non-visual production environment. The device comprises a vacuum cavity, an unwinding shaft and a winding shaft are arranged in the vacuum cavity, a base coiled material is wound and unwound and conveyed between the unwinding shaft and the winding shaft, a plurality of conveying rollers are arranged between the unwinding shaft and the winding shaft, a half shaft is arranged at the end of each conveying roller in the axial direction in a protruding mode, one section of the circumference of the half shaft is a cylindrical surface which is coaxial with the conveying roller and has the radius of R, the distance between other positions of the circumference of the half shaft and the axis is smaller than R, an ejector pin is arranged on one side of the half shaft, and the distance between the tip of the ejector pin and the axis of the conveying roller is R. Rotation period signals of the conveying rollers are converted into square waves to be output through a matching structure of the half shafts and the ejector pins, rotation speed data can be obtained through analysis of square wave periods and phases, and the synchronism of the conveying rollers is detected.

Description

technical field [0001] The invention belongs to the field of solar cell production, and relates to a CIGS flexible solar cell production and processing equipment, in particular to a roll-to-roll conveying synchronous control structure of the CIGS co-steaming method. Background technique [0002] Flexible solar cell sheet is to form solar photovoltaic material coating on flexible and rollable substrate. Copper indium gallium selenide (CIGS) thin-film battery is a solar photovoltaic material with high mass-to-power ratio and good stability, and is generally considered to be the most promising flexible solar battery material. The multi-element co-evaporation method is the most widely used CIGS coating method. The coating is completed in a vacuum environment, and copper, indium, gallium, and selenium are co-evaporated to form a polycrystalline coating on the surface of the substrate. Vapor coating is completed in a vacuum, high temperature, and highly corrosive environment, and...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/56C23C14/24C23C14/06C23C14/54H01L31/18
CPCY02P70/50
Inventor 王培双任宇航罗明新徐彩军
Owner ZHEJIANG SHANGYUE OPTOELECTRONICS TECH