Roll-to-roll conveying synchronous control structure of CIGS co-evaporation method
A synchronous control, roll-to-roll technology, applied in final product manufacturing, vacuum evaporation coating, sustainable manufacturing/processing, etc., can solve problems such as difficulty in finding in time, conveying rollers affecting coating quality, etc.
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[0023] Embodiment: a kind of roll-to-roll transport synchronous control structure of CIGS co-steaming method, such as figure 1 shown. The device includes a vacuum chamber 1, and an unwinding shaft 2 and a winding shaft 4 are arranged in the vacuum chamber. The unwinding shaft 2 is connected with an independently controllable unwinding servo motor 3, and the winding shaft 4 is connected with an independently adjustable winding servo motor. Motor 5. Between the unwinding shaft 2 and the winding shaft 4, the base coil 6 is retracted and transported. Several conveying rollers 7 are arranged between the unwinding shaft 2 and the winding shaft 4 , and the conveying rollers 7 are the conveying tracks of the base coil 6 . The evaporation source 9 and the quality control sensor 10 of the CIGS co-evaporation evaporation method and the quality control sensor 10 are arranged below the middle section of the substrate coil 6. The quality control sensor 10 includes a temperature sensor, a ...
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