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Flexible pressure sensor with high sensitivity and wide range and preparation method thereof

A pressure sensor and wide range technology, applied in the direction of measuring force, instruments, measuring devices, etc., can solve the problems of low pressure monitoring range, reduced sensitivity, and failure to meet application requirements, and achieve improved pressure monitoring range, high sensitivity, The effect of low production cost

Pending Publication Date: 2021-04-23
JIAXING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The flexible pressure sensor has high sensitivity, and the maximum sensitivity is about 3.2KPa in the pressure range of 0-0.5KPa -1 , but its pressure monitoring range is low, only 20KPa, which is far from meeting the actual application requirements
[0005] Document 2 (Facile Preparation of Hybrid Structure Based on Mesodome and Micropillar Arrays as Flexible Electronic Skin with Tunable Sensitivity and Detection Range) discloses that improving the pressure monitoring range of a device usually reduces its sensitivity. Therefore, the contradiction between high sensitivity and wide range It is one of the main problems that limit the wide application of flexible pressure sensors

Method used

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  • Flexible pressure sensor with high sensitivity and wide range and preparation method thereof
  • Flexible pressure sensor with high sensitivity and wide range and preparation method thereof
  • Flexible pressure sensor with high sensitivity and wide range and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1~9

[0062] Configure the conductive nanoparticle dispersion liquid according to the parameters in Table 1: place the conductive nanoparticles in deionized water at room temperature (25°C) for ultrasonic dispersion for 0.5 to 1 hour, and the ultrasonic power is 400W to obtain a mass concentration of the conductive nanoparticles of 0.1 to 0.5 % conductive nanoparticle dispersion.

[0063] Table 1

[0064] Example serial number conductive nanoparticles Dispersion time (hours) Concentration Example 1 carbon nanotubes 0.5 0.4% Example 2 carbon fiber 0.5 0.1% Example 3 carbon black 0.8 0.25% Example 4 metal nanoparticles 1 0.3% Example 5 mineral powder 1.5 0.4% Example 6 metal nanowire 1.4 0.35% Example 7 metal oxide powder 2 0.4% Example 8 Graphene 2 0.5% Example 9 A mixture of carbon nanotubes and carbon fibers with a mass ratio of 1:1 2 0.3%

Embodiment 10~18

[0066] Using the raw materials in Table 2, a polymer film with a network structure of microfibers is prepared by a corresponding film-making process; see Table 2 for the diameters of microfibers in the corresponding polymer film.

[0067] Table 2

[0068]

[0069]

Embodiment 19

[0071] A preparation method of a loose compressible conductive layer is as follows: firstly, the polymer film having an ultrafine fiber network structure prepared in Example 10 is ultrasonically cleaned in ethanol for 0.4h, and the ultrasonic power of the ultrasonic cleaning is 500W, and then the The conductive nanoparticle dispersion prepared in Example 1 was sprayed onto the surface of the polymer film with a network structure of ultrafine fibers, and finally dried at 40°C for 36 hours to obtain a loose and compressible conductive layer; 0.5% of the mass of polymer film with fine fiber network structure;

[0072] The prepared loose compressible conductive layer is a conductive layer with a multi-level micro / nanoporous structure composed of ultrafine fiber network and conductive nanoparticles; the pore size of the multi-level micro / nanoporous structure is 200 μm; The electrical conductivity is 0.8S / m; the thickness of the loose compressible conductive layer is 0.6mm.

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Abstract

The invention relates to a flexible pressure sensor with high sensitivity and wide range and a preparation method thereof. The preparation method comprises the steps of firstly, respectively preparing a flexible sensibilization layer with the surface being provided with a microstructure bulge array, a loose compressible conductive layer and an interdigital electrode, then covering one side of the loose compressible conductive layer on the surface of the flexible sensibilization layer with the microstructure bulge array, enabling the other side of the loose compressible conductive layer to be in contact with the electrode surface of the interdigital electrode, and packaging by using an adhesive to obtain the flexible pressure sensor with high sensitivity and wide range. The prepared flexible pressure sensor with high sensitivity and wide range comprises a flexible sensibilization layer, an interdigital electrode and a loose compressible conductive layer between the flexible sensibilization layer and the interdigital electrode, and the loose compressible conductive layer is a conductive layer which is formed by compounding an ultrafine fiber network and conductive nanoparticles and has a multi-stage micro / nano-pore structure. The preparation method is simple and suitable for large-scale industrial production, and the prepared flexible pressure sensor has high sensitivity and a wide range.

Description

technical field [0001] The invention belongs to the technical field of pressure sensors, and relates to a flexible pressure sensor with high sensitivity and wide range and a preparation method thereof. Background technique [0002] As a very important electronic device for information collection, flexible pressure sensors can convert external pressure stimuli into electrical signals such as resistance, capacitance, and current that can be observed in real time. Behavior monitoring and other fields play an important role and become one of the main research hotspots in the field of flexible electronics. According to different sensing mechanisms, flexible pressure sensors can be classified into piezoresistive, capacitive, piezoelectric, and frictional types. Among them, the piezoresistive flexible pressure sensor has the characteristics of simple structure, easy-to-read signal, and low energy consumption. It has shown great advantages in wearable devices, human-computer intera...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/22
CPCG01L1/2287
Inventor 崔西华徐之光
Owner JIAXING UNIV