Gamma-polyglutamic acid-based humidity sensor and preparation method thereof
A humidity sensor and polyglutamic acid-based technology, which is applied in the field of humidity sensitive elements and its preparation, can solve the problems of easy peeling off of the base sensitive film, low sensor accuracy, and difficult integration, so as to improve the anti-bending characteristics and benefit Large-scale manufacturing and promotion, responding to large effects
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[0030] like figure 1 As shown, the preparation method of the gamma-polyglutamic acid-based humidity sensor provided by the present invention comprises the following steps:
[0031] (1) Pretreatment of the substrate of sensitive devices, including cleaning, drying and hydrophilic treatment;
[0032] (2) preparing a γ-polyglutamic acid dispersion or a γ-polyglutamic acid-based composite sensitive material dispersion;
[0033] (3) Depositing the sensitive material dispersion on the sensitive device substrate to form a humidity sensitive layer;
[0034] (4) After the sensitive device with the humidity sensitive layer is dried and aged, a γ-polyglutamic acid-based humidity sensor is obtained.
[0035] In the above method, the solvent for preparing the sensitive material dispersion in step (2) can be selected from deionized water, ethanol, acetone or N-methylpyrrolidone and the like. In step (3), the deposition process of depositing the sensitive material dispersion on the substr...
Embodiment 1
[0037] The sensitive device selected in this embodiment is an interdigital electrode, and the interdigital electrode is made of a gold electrode on a flexible polyimide (PI) substrate. The interdigital spacing of the interdigital electrode is 200 μm, and the interdigital width of the interdigital electrode is 200 μm, and the electrode thickness of the interdigitated electrodes is 100 nm. In this example, pure γ-polyglutamic acid was selected as the humidity-sensitive material, and a γ-polyglutamic acid-based humidity-sensitive layer was prepared by a drop-coating process. The specific preparation steps were as follows:
[0038] (1) Pretreatment of PI substrate gold interdigitated electrodes, cleaning with ionized water, acetone, alcohol and deionized water; after drying, perform 30min UV hydrophilic treatment;
[0039] (2) Prepare the γ-polyglutamic acid dispersion, the solvent is deionized water, configure the γ-polyglutamic acid dispersion with a concentration of 0.1 mg / mL, ...
Embodiment 2
[0042] The sensitive device selected in this embodiment is a quartz crystal microbalance (QCM) device, and the upper and lower metal electrodes of the QCM device are all silver electrodes, and its basic frequency is 9.98 MHz; pure gamma-polyglutamic acid is selected as the humidity sensitive device in this embodiment. material, its specific preparation steps are:
[0043] (1) Pre-treat the QCM device, wash it with ionized water, acetone, alcohol and deionized water; after drying, perform 20min plasma treatment;
[0044] (2) Prepare the γ-polyglutamic acid dispersion, the solvent is deionized water, configure the γ-polyglutamic acid dispersion with a concentration of 0.1 mg / mL, and use it for later use after ultrasonic treatment;
[0045] (3) Spray 0.2mL of dispersion on both sides of the QCM device by spraying process to prepare a humidity sensitive film; dry at 60°C for 12 hours, then cycle and age the sensor for 12 hours in a dry and wet environment to obtain γ-polyglutamine...
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