Preparation method of low-temperature-resistant stretchable solid-liquid double-phase CuGa2-GaInSn conductive thin film

Abstract

The invention provides a preparation method of a low-temperature-resistant stretchable solid-liquid double-phase CuGa2-GaInSn conductive film. According to the method, thermal evaporation is innovatively conducted on a copper (Cu) atomic layer and a gallium (Ga) atomic layer on a substrate, subjected to plasma and sulfhydrylation treatment, in sequence, and then indium (In) and tin (Sn) are placed in an evaporation tank of a vacuum coating machine at the same time. The indium (In) and the tin (Sn) are evaporated at the upper end of the gallium (Ga) atomic layer at the same time through a co-thermal evaporation process, Cu and Ga are subjected to vacuum heating treatment to react to form solid-phase CuGa2, Ga, In and Sn are alloyed to form liquid-phase GaInSn resistant to the low temperature of -19 DEG C, and finally the CuGa2-GaInSn solid-liquid double-phase conductive thin film is prepared. According to the method, liquid phase Ga is doped with In and Sn atoms, the solidification temperature of a liquid phase is effectively lowered, and the low-temperature phase stability of the solid-liquid thin film is improved; meanwhile, Cu is adopted to replace expensive Au to serve as a solid phase active point, and the preparation cost is reduced; and the CuGa2-GaInSn solid-liquid double-phase conductive thin film prepared through the method can be applied to stretchable conductive components and has very excellent application prospects.

Description

technical field [0001] The invention relates to the technical field of advanced electronic materials, in particular to a low temperature resistant stretchable solid-liquid dual phase CuGa 2 -Preparation method of GaInSn conductive thin film. Background technique [0002] Currently, Gallium based-Liquid Metal (Ga-LM) combines electricity (electrical conductivity: 3.4-6.7×104S / cm), heat (thermal conductivity: 16.5-29.3W / m K), mechanical and Fluid characteristics, and has low toxicity safety and high stability. The Young's modulus of Ga-LM is 5-6 orders of magnitude lower than that of commonly used polymer substrates, and 10-12 orders of magnitude lower than that of common metal and carbon materials, and it can still maintain stable electrical conductivity when stretched to 700%. Its strain-conductance stability has been significantly improved compared with traditional metals, making it one of the most attractive materials for fabricating stretchable conductive elements. Stu...

AI Technical Summary

Problems solved by technology

However, since the surface tension (γ) of GaIn and GaInSn are as high as 624mN m -1 and 534mN m -1 , leading to the inability to obtain low freezing point GaIn or GaInSn as a liquid phase solid-liquid dual-phase conductive film by blending

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