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Method for manufacturing micro thermoelectric device by using 3D printing technology

A technology of 3D printing and thermoelectric devices, applied in the manufacture/processing of thermoelectric devices, and thermoelectric devices that only use the Peltier or Seebeck effect, etc., can solve the problems of limited development, high processing technology and equipment, and achieve low cost and integration , promote the effect of research and development

Pending Publication Date: 2021-06-01
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Its market demand is also very urgent; but the production and integration of micro thermoelectric devices still rely on high processing technology and equipment, such as: photolithography equipment, FIB cutting equipment, etc., which greatly limits its further development

Method used

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  • Method for manufacturing micro thermoelectric device by using 3D printing technology
  • Method for manufacturing micro thermoelectric device by using 3D printing technology

Examples

Experimental program
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Effect test

Embodiment

[0041]Such asfigure 1 As shown in Bi2TE3SB2TE3The thermoelectric slurry is an example, and the method of making micro-thermoelectric devices using 3D printing techniques, including the following steps:

[0042](1) This method utilizes ball mill to get P-type SB2TE3N-type BI2TE3The particles of the two powders obtained by the thermoelectric powder and the ball milling are below 10 μm or less, which facilitates the powder compaction and reduces the porosity. The ethylene glycol and propanol are mixed with two thermoelectric powders, respectively, and two sluries that meet specific rheological properties are formed.

[0043]Ethylene glycol and propanol volume ratio of ethylene glycol and propylene glycol are 0: 1 to 1: 1, and P-type Sb2TE3Power powder or N-type BI2TE3The volume of the thermoelectric powder accounts for 10% to 90% of the total volume of the slurry. When the specific rheological properties refer to the needle, the slurry can exhibit a droplet suspended in the needle when the n...

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Abstract

The invention relates to the field of 3D printing, functional films and micro thermoelectric devices, and particularly relates to a method for manufacturing a micro thermoelectric device by using a 3D printing technology. P-type and n-type thermoelectric powders are obtained by ball milling, and a binder and the powder are uniformly mixed according to a certain proportion to form two kinds of slurry meeting specific viscosity requirements. The method comprises the following steps: firstly, processing a polyimide film into a slurry forming mask plate by using a micro-beam laser cutting technology, and pasting the slurry forming mask plate on a silicon oxide sheet with a device electrode deposited on the surface; and then accurately printing the slurry on the device electrode by adopting an electric control displacement table and a 3D printing technology, and carrying out hot pressing sintering molding on a formed thermopile. Then, electrode manufacturing is completed through a conductive adhesive transfer device, alignment and packaging of an upper electrode and a lower electrode of the device are completed through a vacuum suction nozzle transfer system, and therefore manufacturing of the micro thermoelectric device is completed.

Description

Technical field[0001]The present invention relates to the field of 3D printing, a functional film, and a micro-thermoelectric device, and is specifically a method of making micro-thermoelectric devices using a 3D printing technique.Background technique[0002]The thermoelectric device can make full use of the waste heat power generation in daily production and life, or the high heat flux refrigeration in the micro-region is an important research content in the current high-efficiency use of my country's resources, the waste of waste, and microsystems. Mini thermoelectric devices have huge potential applications in power generation, refrigeration and sensors. In terms of cooling, it has the advantages of other transduction devices that cannot be combined, and can effectively solve heat dissipation problems of electronic microsystems; for power generation, due to their many advantages, power supply can be supplied to various micro-sensors and medical devices implanted with human body; i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L35/34H01L35/28H10N10/01H10N10/10
CPCH10N10/10H10N10/01
Inventor 邰凯平乔吉祥赵洋康斯清
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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