Microelectronic machinery microwave frequency detector and method for making same

A micro-electromechanical, microwave frequency technology, applied in the direction of frequency measurement device, frequency to phase shift conversion, generator/motor, etc., can solve the problems of small signal amplitude, DC power consumption, etc., and achieve the effect of wide measurement range

Inactive Publication Date: 2009-03-18
SOUTHEAST UNIV
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Problems solved by technology

Traditional microwave frequency detectors are based on diodes, which have the dis

Method used

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  • Microelectronic machinery microwave frequency detector and method for making same
  • Microelectronic machinery microwave frequency detector and method for making same
  • Microelectronic machinery microwave frequency detector and method for making same

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Embodiment Construction

[0039] Micro-electromechanical microwave frequency detector of the present invention is a kind of microwave instantaneous frequency on-line detector, is substrate with GaAs substrate, and specific embodiment is as follows:

[0040] Design one-to-three power splitter a, coplanar waveguide transmission line b, two-in-one power combiner c, fixed beam structure d and thermal coupling structure e on the substrate:

[0041] One-to-three power splitter a is composed of port one 1, port two 2, port three 3, port four 4, asymmetric coplanar stripline 5 and tantalum nitride resistor 6 composed of coplanar waveguides. Port one 1 passes through asymmetric The coplanar stripline 5 is respectively connected to port two 2 and port three 3, and is connected to port 4 through a coplanar waveguide structure. A tantalum nitride resistor 6 is connected between them; the two-in-one power combiner c is composed of port one 7, port two 8, port three 9, asymmetric coplanar stripline 5 and tantalum ni...

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Abstract

The invention relates to a microelectronic mechanical microwave frequency detector and a preparation method thereof. The microelectronic mechanical microwave frequency detector has simple structure, can measure unknown microwave signals, has large amplitude range of the measurement signals, can avoid consuming direct current power, and is easy to be integrated. The microelectronic mechanical microwave frequency detector adopts a gallium arsenide substrate provided with a 1-to-3 power distributor (a), a coplanar wave guide transmission line (b), a 2-to-1 power distributor (c), a fixing beam structure (d) and a thermocouple structure (e), thereby forming the microelectronic mechanical microwave frequency detector.

Description

technical field [0001] The invention proposes a microwave frequency detector based on micro-electro-mechanical system (MEMS) technology, which belongs to the technical field of micro-electro-mechanical systems. Background technique [0002] In microwave research, microwave frequency is an important parameter to characterize microwave signal characteristics, and the measurement of microwave frequency plays a very important role in microwave wireless application and measurement technology. Traditional microwave frequency detectors are based on diodes, which have the disadvantages of consuming DC power and measuring relatively small signal amplitudes. In the past 20 years, with the rapid development of MEMS technology, in-depth research has been carried out on the structure of MEMS fixed beams, making it possible to use MEMS technology to realize microwave frequency detectors. Contents of the invention [0003] Technical problem: The purpose of this invention is to provide a...

Claims

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Application Information

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IPC IPC(8): G01R23/12B81B7/02B81C1/00
Inventor 廖小平张俊
Owner SOUTHEAST UNIV
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