Numerical simulation method and system for rapid ionization device
A numerical simulation and device technology, applied in the field of semiconductor analysis, can solve problems that are not suitable for rapid ionization device simulation
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[0052] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0053] The present invention provides a method and system for numerical simulation of fast ionization devices. The numerical simulation program thus constructed has great flexibility and can be used for the research and production of the conduction mechanism of fast ionization devices. Device parameter design before fabrication.
[0054] figure 1 It is a flowchart of a numerical simulation method for a fast ionization device provided by an embodiment of the present invention; figure 1 shown, including the following steps:
[0055] S101, determine the area to be simulated and its size of the rapi...
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