A kind of ethanol vapor and gap sensitive element and its preparation method
A technology of ethanol vapor and sensitive components, which is applied in the field of sensor measurement, can solve the problems of not having the simultaneous measurement of gas and non-contact gaps, and the difficulty of installing multiple sensitive components, and achieves easy commercialization and industrialization, low cost, and small size Effect
Active Publication Date: 2021-12-21
CENT SOUTH UNIV
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Problems solved by technology
Based on the existing technology, thin gap sensitive elements and thin gas sensitive elements have been developed, but due to the limitation of the size of the field space structure, it is difficult to install multiple sensitive elements, so it is necessary to reduce the sensitive elements placed in the narrow interlayer structure as much as possible. Number of components
However, the sensitive elements developed in the prior art do not have the function of measuring gas and non-contact gap at the same time
Method used
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[0046] The length of the ceramic substrate is 50mm, the width is 38.5mm, and the thickness is 1mm; the length of the electrode mask is 50mm, the width is 38.5mm, the thickness is 0.01mm, the electrode radius is 2mm, the electrode length is 31.43mm, and the electrode width is 1mm; The length of the insulating layer mask is 50mm, the width is 38.5mm, the thickness is 0.01mm, the length of the insulating layer is 27.5mm, and the width of the insulating layer is 3mm; the length of the coil mask is 50mm, the width is 38.5mm, and the thickness is 0.01mm. The line width and line spacing of the coil are both 0.5 mm, and the number of turns is 10; the mask plate is made of 304 stainless steel by photochemical etching process.
[0047] Use acetone (analytical pure), absolute ethanol (analytical pure), and deionized water to ultrasonically clean the ceramic substrate, electrode mask, insulating layer mask, and coil mask for 15 minutes each; then use nitrogen to dry and place Store in a f...
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Abstract
The invention relates to an ethanol vapor and gap sensitive element, which includes a ceramic substrate, a coil, an insulating layer and an electrode; the ethanol vapor and gap sensitive element is a coil type; the ceramic substrate has a length of 50 mm, a width of 38.5 mm, and a thickness of 1mm; the coil line width and line spacing are both 0.5mm, and the number of turns is 10 turns; the insulating layer structure is rectangular, the insulating layer material is alumina, the insulating layer length is 27.5mm, and the insulating layer width is 3mm; The electrode structure is non-interdigitated, the electrode material is tin dioxide, the electrode radius is 2mm, the length is 31.43mm, and the width is 1mm; the sensitive element is sensitive to ethanol vapor and sensitive to changes in the non-contact gap. The ethanol vapor and gap sensitive element developed by the invention is small in size, thin in thickness, simple in structure, and low in cost. Gas and non-contact gap measurement can be realized with a single sensitive element, and it is suitable for measuring gas and gap between narrow layers of industrial equipment. The key technology can also be used in the development of multifunctional electronic skin and other fields.
Description
technical field [0001] The invention belongs to the technical field of sensor measurement, in particular to a gas gap sensor. Background technique [0002] There are many narrow interlayer structures in the key components of modern large-scale industrial equipment. In order to ensure the safety of the system, it is necessary to measure the gap between the narrow curved surfaces and ethanol vapor. Based on the existing technology, thin gap sensitive elements and thin gas sensitive elements have been developed, but due to the limitation of the size of the field space structure, it is difficult to install multiple sensitive elements, so it is necessary to reduce the sensitive elements placed in the narrow interlayer structure as much as possible. number of components. However, the sensitive elements developed in the prior art do not have the function of simultaneously measuring gas and non-contact gap. Therefore, how to make a single sensitive element capable of measuring non...
Claims
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IPC IPC(8): C23C14/04C23C14/35C23C14/08C23C14/58G01B7/14G01N27/12
CPCC23C14/042C23C14/352C23C14/086C23C14/081C23C14/0036C23C14/5806G01B7/14G01N27/12
Inventor 王璐珩刘裕杰南茂元
Owner CENT SOUTH UNIV