Electrolytic polishing control system and control method thereof

Abstract

The invention discloses a control system for electrolytic polishing, comprising: an electrolytic polishing pool filled with an electrolyte, and a workpiece to be electropolished is immersed in the electrolyte; a measurement system for monitoring and collecting each time of the electrolytic polishing in the electrolytic polishing pool The electrical signal value of the segment is transmitted, and the electrical signal value is transmitted to the breakpoint control system; the breakpoint control system receives the electrical signal value collected by the measurement system, and compares and analyzes the incoming electrical signal values ​​to determine whether It is necessary to maintain the electrolytic polishing state and send corresponding signals to the power supply system; the power supply system is used to input a constant voltage or current into the electrolytic polishing pool and receive the signal from the breakpoint control system. After the signal of polishing, the power supply is cut off in time, and the constant voltage or current is stopped into the electrolytic polishing pool to end the electrolytic polishing.

Description

technical field [0001] The invention relates to the technical field of plasma etching, in particular to a control system and a control method for electropolishing plasma chamber components. Background technique [0002] In the plasma etching equipment, an anodizing process is used for each chamber component in order to avoid plasma corrosion, and a friction-resistant and corrosion-resistant coating is formed on the surface of the chamber component prepared by the anodization process. Before the anodizing process, it is necessary to perform electropolishing on each chamber part, so that the surface roughness of each chamber part is reduced, and the stress layer is completely removed, so as to ensure the best corrosion resistance of the chamber parts after the anodization process. excellent. [0003] Please refer to figure 1 As shown in the prior art, each chamber component is immersed in an electrolytic polishing pond filled with electrolyte, and the power supply system is ...

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Problems solved by technology

[0003] Please refer to figure 1 As shown, in the prior art, each chamber component is immersed in an electropolishing pool filled with electrolyte, the power supply system is electrically connected to the electropolishing pool and a constant voltage or current is input into the electropolishing pool, but this method The time of electropolishing is fixed or manually judged. Therefore, the phenomenon of insufficient polishing or over-polishing of chamber parts often occurs, resulting in uneven thickness of electropolished chamber parts and pitting pits on the surface. This will affect the treatment of the subsequent anodizing process, and the finally obtained chamber parts do not have good corrosion resistance

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