Intelligent evaporation coating machine

Abstract

The invention discloses an intelligent evaporation coating machine which mainly comprises a coating chamber, an evaporation source, a central intelligent control module and a vacuum system. The evaporation source comprises an evaporation boat, a temperature sensing array and a flexible boundary driving system; the evaporation boat comprises a frame and a bottom, and the frame comprises a fixed frame and a flexible frame; the flexible frame is arranged on the side, parallel to the coating breadth direction, of the evaporation boat, and the fixed frame is arranged on the other three sides of the evaporation boat; the temperature sensing array is mainly composed of a plurality of temperature sensors, the temperature sensors are divided into multiple columns, and the multiple columns of temperature sensors are arranged at the bottom of the evaporation boat side by side in the coating film breadth direction; and in the evaporation coating process, the central intelligent control module can control the flexible boundary driving system to carry out closed-loop online regulation and control on displacement and deformation of the flexible frame of the evaporation boat, and the boundary of an evaporation area is intelligently controlled in real time, so that a film layer deposited on a substrate is in a required film thickness distribution state.

Description

technical field [0001] The invention belongs to the technical field of vacuum coating, in particular to an intelligent evaporation coating machine used in vacuum evaporation coating. Background technique [0002] In recent years, the rapid development of optical technology, energy storage technology, and flat panel display technology has put forward higher requirements for the uniformity and stability of thin film product performance. As one of the important process technologies for thin film preparation, vacuum evaporation coating has been widely used in the industrial production of thin film products in the above fields. Due to the influence of the cosine law of the evaporation source, if there is no interference, the distribution of the film layer deposited on the substrate during the vacuum evaporation process will show an uneven state. [0003] Vacuum evaporation coating machines currently used in the coating industry generally use correction baffles to solve this prob...

AI Technical Summary

Problems solved by technology

On the one hand, the use of the correction baffle is at the cost of sacrificing the efficiency of the coating film and the use efficiency of the film material; on the other hand, once the correction baffle is set, it will be relatively fixed during the coating process, and the evaporative substance will evaporate during the evaporation process. Evaporation characteristics change with different stages. In this case, even if a correction baffle is used, the film thickness distribution on the product will gradually change at different stages of long-term coating, which obviously cannot satisfy Optics, energy storage, and flat panel display, etc., have strict requirements on product performance

In addition, behind the rational setting of the correction baffle, a large amount of empirical data is often required as support, which is not conducive to the original product development and development of emerging film industries.

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