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Metamaterial modulator

A technology of modulators and metamaterials, applied in the direction of instruments, antennas, electrical components, etc., can solve the problems of unrealistic application and poor modulation effect, and achieve the effects of ultra-high modulation effect, wide modulation bandwidth, and high modulation depth

Active Publication Date: 2021-08-17
ZAOZHUANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The invention provides a metamaterial modulator based on graphene ultra-high modulation depth, which solves the current problems of poor modulation effect and unrealizable application

Method used

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Embodiment 1

[0047] figure 1Shown is a schematic structural diagram of a metamaterial modulator, an embodiment of the present invention provides a metamaterial modulator, the metamaterial modulator includes a surface layer 1, a graphene layer 2, and a flexible dielectric layer 3 arranged from top to bottom , silicon rectangular strip structure substrate layer 4;

[0048] Among them, the flexible dielectric layer 3 is attached to the upper surface of the silicon rectangular structure substrate layer 4 , the graphene layer 2 is attached to the upper surface of the flexible dielectric layer 3 , and the surface layer 1 is attached to the upper surface of the graphene layer 2 .

[0049] figure 2 Shown is a schematic diagram of a silicon strip structure of a metamaterial modulator, and the silicon strip structure substrate layer 4 is composed of several identical silicon strip structures arranged alternately.

[0050] image 3 Shown is the electrode distribution diagram of a metamaterial mod...

Embodiment 2

[0067] Image 6 Shown is a flow chart of a method for preparing a metamaterial modulator, an embodiment of the present invention provides a method for preparing a metamaterial modulator, and the method includes:

[0068] S1. Prepare a layer of high-resistance silicon layer as the underlying substrate layer 4 .

[0069] Prepare a 300 μm thick high-resistance silicon layer.

[0070] S2. Etching a silicon strip structure with a height of 65 microns on the underlying substrate layer 4 .

[0071] S3. Spin-coating polyimide on the substrate layer 4 with the rectangular silicon strip structure, the specific steps include. :

[0072] Spin-coat 10 μm thick polyimide film on 300 μm high-resistance silicon: After cleaning the prepared high-resistance silicon, spin-coat a polyimide solution with a viscosity of 3600 (centipoise) on the silicon structure surface, spin-coating time For 60 seconds, the speed is 2200RPM. Then the polyimide solution is baked, the baking temperature is 120°...

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Abstract

The invention discloses a metamaterial modulator which comprises a surface layer, a graphene layer, a flexible dielectric layer and a silicon rectangular strip structure substrate layer which are arranged from top to bottom. A silicon rectangular strip structure is etched on a silicon substrate to form an all-dielectric metamaterial, resonance is generated through interaction of the silicon rectangular strip structure and terahertz waves, the conductivity of the graphene layer is changed through an excitation mode of laser incidence or voltage application, and therefore optical / electric regulation and control over the terahertz waves are achieved. The characteristic of low loss of the all-dielectric material is utilized, so that higher modulation depth can be realized.

Description

technical field [0001] The invention relates to a terahertz wave signal modulator, which is one of the key functional devices in the technical field of terahertz communication, in particular to a novel ultrahigh-sensitivity dynamic modulation terahertz wave metamaterial modulator. Background technique [0002] Metamaterials are artificial microstructures with subwavelength sizes that are periodically arranged, and have unique electromagnetic properties that are not available in natural materials. The geometry of the artificially designed cell structure has a unique optical response to electromagnetic waves. In recent years, metamaterials have become a hot spot in the development of unconventional optical devices. With people's pursuit of more diverse functions, the functional diversification of metamaterials continues to expand to the field of dynamic adjustment. Optical / electrical regulation based on the combination of graphene and metamaterials is a key area for enhancin...

Claims

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Application Information

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IPC IPC(8): G02F1/03H01Q15/00
CPCG02F1/0305G02F1/0316G02F1/0327H01Q15/0086H01Q15/0026H01Q15/002
Inventor 姚海云梁兰菊闫昕
Owner ZAOZHUANG UNIV
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