Liquid metal driving device based on piezoelectric film, control method and manufacturing method

Abstract

The invention provides a liquid metal driving device based on a piezoelectric film, a control method and a manufacturing method. The driving device comprises a substrate and a cover plate, wherein a flexible micro-channel structure is formed on the substrate; a liquid metal liquid storage tank capable of containing liquid metal is formed at one end of the flexible micro-channel structure; and thin film structures are integrated on the flexible micro-channel structure, the thin film structures displace and deform under voltage control, and the flexible micro-channel structure deforms, so that the liquid metal filled in the flexible micro-channel structure is driven to flow through the extrusion effect. According to the liquid metal driving device, reversible continuous or stepped flow control of the liquid metal in the flexible micro-channel structure is achieved, the liquid metal can flow in a higher-precision and large-scale manner, the position of the liquid metal in the flow channel structure can be accurately controlled, the liquid metal driving device can be applied to the fields of camouflage, communication, heat dissipation, energy harvesting and the like, and the dynamic regulation and control capacity is achieved.

Description

technical field [0001] The invention belongs to the technical field of liquid metal driving devices, and in particular relates to a piezoelectric film-based liquid metal driving device, a control method and a manufacturing method. Background technique [0002] Liquid metals represented by gallium-based alloys have received great attention in recent years due to their good electrical conductivity, continuous fluidity at room temperature, large deformation, and controllability, and have been widely used in flexible electronics, flexible sensing, and reconfigurable radio frequency systems. and other fields have shown excellent application prospects. How to drive and control the continuous flow of liquid metal in a specific structure with high precision to realize the functional characteristics of arbitrary reconstruction of electrical length that cannot be achieved by conventional gold, silver, copper and other metal materials is a key problem that has been researched and broke...

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Problems solved by technology

[0003] At present, the driving control of liquid metal in the microchannel structure is mainly driven by conventional electromagnetic pumps, pressure, and voltage. However, electromagnetic pumps are currently relatively large in size and are generally used in channel structures with liquid metal channels of millimeter-centimeter scale. However, the electrical blocking effect of the liquid metal in the channel structure cannot be realized; the pressure-driven control method requires an external drive pump with a large volume, which is difficult to achieve miniaturization and cannot be integrated with the channel structure; the voltage-driven control method is in the In the process of dynamic reconstruction of liquid metal, the voltage is directly applied to the liquid metal and the oxide layer removal solution, which affects the electrical properties of the liquid metal, and the surface tension of the liquid metal is large, so it is difficult to apply to the channel structure with a long length

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