Ultrathin glass single-side thinning method
An ultra-thin glass, single-sided technology, used in machine tools, grinders, grinding/polishing equipment suitable for grinding workpiece planes, etc., can solve the problem of polishing and repairing the bumps and scratches on the surface of the glass, and the effective area of the glass is prone to glue residue. Contamination, the difficulty of tearing off the acid-proof film, etc., to achieve the effect of improving the performance yield, reducing the risk of fragmentation, and being convenient and quick to remove
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Example Embodiment
[0037] Example 1
[0038] like Figure 1 ~ 3 As shown, the present invention provides an ultra-thin glass single-sided thinning method, including the following steps:
[0039] Step 1: The non-thinned surface of the glass substrate 1 is attached to the film: where the attachment film includes a photovoltaic membrane 3 and the isolation layer 4, the spacer layer 4 covers the effective circuit region of the glass substrate 1, the isolation layer 4 It can be arranged to be released from paper or electrostatic films, and the release paper can be recovered, and the electrostatic film attachment effect is better, the size of the isolation layer 4 is the same as the size of the effective circuit region of the glass substrate 1, and the film 3 The size is the same as the size of the non-thinned surface of the glass substrate 1, and the photolysis membrane 3 is attached to the isolation layer 4 and the non-thin surface of the glass substrate 1 is covered. The isolation layer 4 protects the r...
Example Embodiment
[0046] Example 2
[0047] Unlike Example 1, the composition and ratio of the etching pretreatment liquid in step 5, the pretreatment mix used by the etching pretreatment includes hydrofluoric acid, sulfuric acid, respectively, with a total mass of the pretreatment liquid, respectively. 2.7%, 45.0-50.0%, the remaining ingredients were water, soaking time was 40-50 min, and the thickness of etch removal was 30 to 50 μm.
[0048] After etching the etched pre-treatment after etching the above ingredient and ratio, the glass substrate 1 having a thickness of 0.3 to 0.5 mm is thinned to 0.05 mm, and the time required for the entire process is 3-4 hours, the glass substrate 1 is thin. The performance is 15.0 ± 2.0%, decoction, scratched, and other surface defects, and thickness CPK = 1.28 (CPK ≥ 1.33 is optimal), and the thickness difference between the monolithic plate is ≤8 μm.
Example Embodiment
[0049] Example 3
[0050] Unlike Examples 1 and Example 2, the components and ratios of the etching pretreatment liquid in step 5 are different, and the pretreatment liquid used in etching pretreatment includes hydrofluoric acid, hydrochloric acid, sulfuric acid, respectively, pretreatment liquid, respectively. The total mass was 2.3-2.7%, 2.0-3.0%, 45.0.0%, the remaining ingredients were water, and the soaking time was 40-50 min, and the etch removal was 30 to 50 μm.
[0051] After etching the etched pre-treatment after etching the above ingredient and ratio, the glass substrate 1 having a thickness of 0.3 to 0.5 mm is thinned to 0.05 mm, and the time required for the entire process is 3-4 hours, the glass substrate 1 is thin. The performance is 88.0 ± 2.0%, decoction, scratches, etc. The non-intensity ratio is 12.0 ± 2.0%, and the thickness CPK = 1.31 (CPK ≥ 1.33 is optimal), the single piece thickness difference is ≤7 μm .
[0052] Comparative analysis of the above Examples 1 t...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap