Method for recycling and purifying a mixed waste liquid of methylethanolamine and diethylene glycol monobutyl ether in the electronic industry

Abstract

The invention discloses a method for recycling and purifying a mixed waste liquid of methylethanolamine and diethylene glycol monobutyl ether in the electronic industry. Impurities in a waste solvent diethylene glycol monobutyl ether are removed through the methods of tempering, liquid separation, de-ionization tower de-ionization and vacuum rectification; impurities in the waste solvent methylethanolamine stripping liquid are removed through the methods of tempering, liquid separation, gas stripping desorption separation, de-ionization tower de-ionization and vacuum rectification; a waste material containing a plurality of impurities such as polymer resin, a photosensitizer and the like is purified through a series of low-energy-consumption processes such as liquid separation, gas stripping desorption separation, de-ionization tower de-ionization and vacuum rectification to obtain an electronic-grade organic solvent diethylene glycol monobutyl ether with the purity of more than or equal to 99.7% (wt) and an industrial-grade organic solvent methylethanolamine with the purity of more than or equal to 99.0% (wt); the recycling of the waste materials diethylene glycol monobutyl ether and methylethanolamine is realized, the pollution degree of the waste solvent to the environment in the production of the photovoltaic industry is reduced, and the production cost is saved.

Description

technical field [0001] The invention relates to the technical field of solvent separation and purification, in particular to a recovery and purification method for mixed waste liquid of methyl ethanolamine and diethylene glycol monobutyl ether in the electronics industry. Background technique [0002] Along with the rapid development of domestic electronic manufacturing industry and optoelectronic industry, the usage of electronic chemicals such as photoresist stripper also increases greatly, and the composition of diethylene glycol monobutyl ether (BDG) and methylethanolamine is used as stripper It is widely used in removing photoresist by swelling and dissolving, and the solution formed by diethylene glycol monobutyl ether, methyl ethanolamine, polymer resin and photosensitizer obtained in production. The solution is a mixed waste solvent of diethylene glycol monobutyl ether and methyl ethanolamine, which has poor environmental protection, a large environmental load, and h...

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Problems solved by technology

[0004] The purpose of the present invention is to solve the pollution of the environment after the waste solution is treated in the prior art, and it will cause a certain degree of waste of resources, and the recovery efficiency is low, and the waste liquid cannot be realized through the process of vacuum distillation in the traditional process. The automatic entry of the system and the effective improvement of the distillation speed, and a method for the recovery and purification of the mixed waste liquid of methyl ethanolamine and diethylene glycol monobutyl ether in the electronics industry is proposed

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