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Variable linear density grating manufacturing method based on PDMS/PUA mutual replication

A production method and line density technology, which is applied in the field of variable line density grating production, can solve the problems of increasing production cost and cycle, and achieve low cost, short production cycle and good replication effect

Inactive Publication Date: 2021-10-08
HEFEI UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In order to obtain higher linear density PDMS gratings, a new template must be made, which undoubtedly increases the production cost and cycle time

Method used

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  • Variable linear density grating manufacturing method based on PDMS/PUA mutual replication
  • Variable linear density grating manufacturing method based on PDMS/PUA mutual replication
  • Variable linear density grating manufacturing method based on PDMS/PUA mutual replication

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Embodiment Construction

[0032] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be further clearly and completely described below in conjunction with the embodiments of the present invention. It should be noted that the described embodiments are only some of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0033] The manufacturing method of the micro-lens array based on the microfluidic technology of the present invention comprises the following steps: a. The manufacturing of the original grating template. b. PDMS replicates the original photoresist template. c. Stretching PDMS and replicating the grating pattern with PUA. d. Using the new PUA as a template, copy a...

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Abstract

The invention discloses a variable linear density grating manufacturing method based on PDMS / PUA mutual replication, and is characterized in that the grating linear density of a PDMS grating is changed by stretching the PDMS grating, deformation of the PDMS grating is fixed through a clamp, and then a deformed PDMS grating pattern is copied and recorded through a PUA ultraviolet curing adhesive; and finally, by taking the PUA as a new template, the grating is repeatedly manufactured on the PDMS again. Through the steps, the linear density of the grating can be changed under the condition that the template is not manufactured again, and the process can be repeated for several times, so that the linear density of the PDMS grating is improved again. Equipment required by the process is simple, and the process has the advantages of low cost, simplicity in operation, short production period and the like.

Description

technical field [0001] The invention relates to a method for manufacturing a variable linear density grating based on mutual replication of PDMS / PUA, and belongs to the technical field of micro-nano processing. Background technique [0002] The grating is composed of a plurality of parallel slits, using the principle of multi-slit diffraction, it is widely used in the fields of spectrometer, optical information processing and optical measurement. Therefore, it is of great significance to develop high-precision and low-cost grating manufacturing technology. [0003] At present, the main grating fabrication methods include mechanical scribing, mask exposure, holographic lithography, electron beam lithography, and nanoimprinting. [0004] Mechanical scribing can produce gratings with specific groove shapes and high aspect ratios. However, due to the limitations of the size of the cutterhead and the stepping accuracy, this method cannot produce a high linear density grating st...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/18
CPCG02B5/1857G02B5/1847
Inventor 金建王旭迪邸思林文豫孙学通
Owner HEFEI UNIV OF TECH
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