Anode and cathode assembly assembling tool of excimer laser discharge cavity

A technology of excimer lasers and cathode components, applied in the laser field, can solve problems such as time-consuming and labor-intensive problems, achieve the effects of reducing costs, avoiding bump damage, and improving assembly efficiency

Pending Publication Date: 2021-10-12
RAINBOW SOURCE LASER RSLASER
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The traditional assembly method adopts manual

Method used

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  • Anode and cathode assembly assembling tool of excimer laser discharge cavity
  • Anode and cathode assembly assembling tool of excimer laser discharge cavity
  • Anode and cathode assembly assembling tool of excimer laser discharge cavity

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[0040] In order to make the objectives, technical solutions and advantages of the present invention, the present invention will be described in further detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely intended to illustrate the invention and are not intended to limit the invention.

[0041] It should be noted that when the element is referred to as "fixed to" or "set to" another element, it can be directly in the other element or may always exist at the same time. When a component is called "connected to" another element, it can be directly connected to another element or may exist at the same time.

[0042] In addition, it is also necessary to explain that the left, right, upper, and lower orientation of the present invention, only the relative concepts of the present invention, or referenced by the normal use state of the product, and should not be considered to have limitatio...

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Abstract

The invention belongs to the technical field of laser, and provides an anode and cathode assembly assembling tool of an excimer laser discharge cavity. The cathode assembly assembling tool comprises a bottom plate, an anode assembling device and a cathode assembling device. The anode assembling device and the cathode assembling device are arranged on the same surface of the bottom plate; the anode assembling device is used for supporting an anode base; and the cathode assembling device is used for supporting a cathode ceramic plate and the cathode, so that the cathode is assembled on the cathode ceramic plate. The anode and cathode assembly assembling tool of the excimer laser discharge cavity can be applied to an assembly line, automatic assembly is achieved, and the assembly efficiency is greatly improved.

Description

technical field [0001] The invention belongs to the technical field of lasers, and specifically relates to the technical field of excimer lasers, and provides an assembly tool for an anode and a cathode assembly of an excimer laser discharge cavity. Background technique [0002] Excimer lasers are a type of gas laser device in which excimer is used as the working substance. The excimer laser has a short laser wavelength and has no thermal effect on materials, so it has a wide range of applications in the field of industrial processing. Especially in the field of high-end lithography, excimer lasers with high repetition frequency, narrow linewidth and high energy characteristics are now available. Excimer lasers have become an absolutely dominant light source in the field of semiconductor lithography. [0003] During the assembly process of excimer laser products, it involves the assembly of the cathode assembly and anode assembly of the discharge cavity. The traditional a...

Claims

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Application Information

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IPC IPC(8): B23P21/00H01S3/038
CPCB23P21/00H01S3/0381H01S3/0382
Inventor 陈文斌刘斌丁金滨江锐沙鹏飞冯泽斌
Owner RAINBOW SOURCE LASER RSLASER
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