Cracking reaction column for byproduct chlorosilane high-boiling product of polycrystalline silicon production, and cracking process

Abstract

The invention discloses a cracking reaction column for a byproduct, namely a chlorosilane high-boiling product of polycrystalline silicon production, belonging to the technical field of polycrystalline silicon production. According to the invention, the lower end of the cracking reaction column is provided with a liquid phase inlet and a hydrogen chloride inlet; the upper end of the cracking reaction column is provided with a liquid phase outlet; the cracking reaction column is internally provided with a coil pipe, and the coil pipe is used for introducing a constant-temperature material; a space between the cracking reaction column and the coil pipe is filled with polychlorosilane cracking resin; separation nets with holes are arranged at the upper end and the lower end of the coil pipe in the cracking reaction column; and a buffer space is reserved in the inner upper portion of the cracking reaction column. The invention also discloses a cracking reaction process using the cracking reaction column. The cracking reaction column and the cracking reaction process provided by the invention can overcome the problems that reaction effect is greatly fluctuated and products are unstable in the prior art when a reaction column with a resin catalyst is adopted for carrying out a cracking reaction on the byproduct, namely the chlorosilane high-boiling product of polycrystalline silicon production since conditions such as a reaction temperature are difficult to control.

Description

technical field [0001] The invention relates to the technical field of polysilicon production, in particular to a pyrolysis reaction column and a pyrolysis process for polysilicon production by-product chlorosilane high boilers. Background technique [0002] At present, in the reduction process in the field of polysilicon production, high boiling substances such as hexachlorodisilane and hexachlorodisiloxane will be produced during the operation of the reduction furnace. The traditional treatment method for these two by-products is to directly discharge the system. [0003] In recent years, in order to effectively utilize this part of by-product silane, domestic manufacturers have begun to use catalytic cracking to treat this by-product. Catalytic methods mainly include resin catalysis and organic catalyst catalysis. This part of the by-product silane is catalyzed by an organic catalyst. For the entire production system, this method introduces new impurities, and from the c...

AI Technical Summary

Problems solved by technology

[0007] The object of the present invention is to provide a cracking reaction column and a cracking process of polycrystalline silicon production by-product chlorosilane high boilers, which solves the problem of resin-containing catalysts in the prior art. When the reaction column cracks the by-product chlorosilane high boilers in polysilicon production, it is difficult to control the reaction temperature and other conditions, resulting in large fluctuations in the reaction effect and unstable products.

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