Single crystal electromagnetic field cooling and temperature measuring mechanism
An electromagnetic field and single crystal technology, applied in the direction of transformer/inductor cooling, electromagnet, single crystal growth, etc., can solve the problems of destroying the insulating layer, bad effects, and destroying the stability of the magnetic field, etc., to achieve easy operation, save space, improve The effect of service life and work efficiency
Pending Publication Date: 2021-12-10
抚顺赛瑞特环保科技有限公司
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Problems solved by technology
Due to the working principle of the single crystal electromagnetic field, when the excitation coil is working, the energized copper coil will generate heat energy. If the cooling effect cannot be achieved, the long-term work will destroy the insulation layer inside the coil, thereby destroying the stability of the magnetic field and causing bad Effect
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[0022] In order to make the purpose, technical solution and advantages of the technical solution clearer, the technical solution will be further described in detail below in conjunction with specific embodiments. It should be understood that these descriptions are only exemplary, and are not intended to limit the scope of the technical solution.
[0023] Such as Figure 1-Figure 3 As shown, this embodiment proposes a single crystal electromagnetic field cooling temperature measurement mechanism for cooling the single crystal electromagnetic field excitation coil, and the single crystal electromagnetic field excitation coil is cooled through the oil medium. The single crystal electromagnetic field cooling temperature measurement mechanism includes an oil inlet pipe 20, The oil pump 30, the connecting hose 40 and the plate heat exchanger 50, wherein the oil inlet pipe 20 is connected to the oil inlet end of the oil pump 30, the first end of the connecting hose 40 is connected to...
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The invention relates to the field of semiconductor single crystal silicon production equipment, in particular to a single crystal electromagnetic field cooling and temperature measuring mechanism which is used for cooling a single crystal electromagnetic field excitation coil. An oil inlet pipe is connected to the oil inlet end of an oil pump, and the first end of a connecting hose is connected to the oil outlet end of the oil pump; the plate heat exchanger is provided with a first interface, a second interface, a third interface and a fourth interface, a liquid flowing pipeline is arranged in the plate heat exchanger, the first interface in the plate heat exchanger is an oil medium input port, the second interface is an oil medium output port, the third interface is a cooling liquid input port, and the fourth interface is a cooling liquid output port; the oil pump drives an oil medium to enter the plate heat exchanger through the first interface, then exchanges heat with cooling liquid flowing through the plate heat exchanger and then is discharged out of the plate heat exchanger through the second interface, so that heat exchange is completed. The mechanism can detect the temperature of the oil medium used by the single-crystal electromagnetic field equipment, and meanwhile, the temperature of the excitation coil of the single-crystal electromagnetic field is adjusted by adjusting the temperature of the oil medium.
Description
technical field [0001] The invention relates to the field of semiconductor single crystal silicon production equipment, in particular to a single crystal electromagnetic field cooling temperature measuring mechanism. Background technique [0002] When the single crystal furnace grows single crystal silicon, it provides a stable magnetic field environment, improves the utilization rate of materials, and improves the performance index of silicon wafers. The existing single crystal furnace can be modified to meet the requirements of improving the quality of single crystal. The single crystal electromagnetic field mainly includes: yoke plate, magnetic guide plate, pole head, excitation coil, heat exchange and cooling components, oil conservator components and other components; my country now attaches great importance to the development and utilization of new energy, and vigorously promotes the development of related industries, especially Solar cells and related green energy manu...
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Login to View More IPC IPC(8): H01F27/12H01F27/10H01F27/40H01F7/06C30B29/06C30B35/00G01K13/00
CPCH01F27/12H01F27/10H01F27/402H01F7/06C30B29/06C30B35/00G01K13/00H01F2027/404H01F2027/406
Inventor 卢秉钊张晓光陈国帅蒙建华
Owner 抚顺赛瑞特环保科技有限公司