Waveguide grating and grating spectrometer with adjustable measuring range
The technology of grating spectrometer and waveguide grating is applied in the field of grating spectrometer, which can solve the problems of inability to realize large-scale promotion, complicated design, high price, etc., and achieve the effects of being suitable for mass production, simple in structure and low in cost.
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[0031] The following describes the embodiments of the present application with reference to the accompanying drawings to make the technical content clearer and easier to understand. The present application can be embodied in many different forms of embodiments, and the protection scope of the present application is not limited to the embodiments mentioned herein.
[0032] Such as figure 1 Shown is an embodiment of a waveguide grating provided by the present application. Including waveguide 2 and grating 1. A periodic structure 11 is arranged on the surface of the grating 1, and the waveguide 2 is arranged on the surface of the grating 1 with the periodic structure. Preferably, the grating 1 is coated with an aluminum metal layer on a titanium oxide substrate. The waveguide 2 is made of a material transparent to the light of the working wavelength, such as silicon dioxide, PET, and the like.
[0033] The waveguide 2 has an upper surface 7 and a side surface 3, and the side ...
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