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Process for reducing scratch of tubular PERC battery

A battery and process technology, applied in metal material coating process, circuit, photovoltaic power generation, etc., can solve problems affecting production line yield, scratches, etc., achieve the reduction of EL scratch rate, good economic and social benefits Effect

Pending Publication Date: 2021-12-24
平煤隆基新能源科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In terms of back passivation, there are currently two technical routes: PECVD and ALD (atomic layer deposition). ALD occupies a large market share due to the advantages of low TMA consumption and high passivation quality, but it needs to be used with PECVD equipment at the same time. Aluminum oxide Silicon nitride and silicon nitride need to be deposited separately. In the process of preparing the silicon nitride film on the back using tubular PECVD equipment, the silicon wafer is fixed on the graphite boat through three clamping points. The front of the silicon wafer is in contact with the graphite boat. After vacuuming, During the process of heating up, nitrogen filling and returning to normal pressure, the silicon wafer will shrink or expand due to the pressure and heat changes in the furnace tube, and the silicon wafer will rub against the graphite boat. Yield

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0016] The process for reducing scratches of tubular PERC cells includes the following steps:

[0017] Start: The graphite boat filled with silicon wafers after the ALD process is automatically transported to the furnace tube of the tubular PECVD equipment, and the temperature in the furnace is set to 490°C;

[0018] Nitrogen filling: high-purity nitrogen gas is fed into the furnace tube, and the nitrogen flow rate is 5000 sccm, until the pressure of the furnace tube reaches normal pressure and the furnace door is opened, and the temperature in the furnace is set at 490°C;

[0019] Release the boat: Send the graphite boat from the ceramic paddle to the inside of the furnace tube and put it on the support mechanism, close the furnace door, and set the temperature in the furnace to 490°C;

[0020] Heating: the furnace tube is heated through the heating control system, and the temperature in the furnace is set to 450°C;

[0021] Pre-pumping: Open the pre-pumping valve to evacuat...

Embodiment 2

[0036] Start: The graphite boat filled with silicon wafers after the ALD process is automatically transported to the furnace tube of the tubular PECVD equipment, and the temperature in the furnace is set to 520°C;

[0037] Nitrogen filling: high-purity nitrogen gas is fed into the furnace tube, and the nitrogen flow rate is 5000 sccm, until the pressure of the furnace tube reaches normal pressure and the furnace door is opened, and the temperature in the furnace is set at 520°C;

[0038] Release the boat: Send the graphite boat from the ceramic paddle to the inside of the furnace tube and put it on the support mechanism, close the furnace door, and set the temperature in the furnace to 520°C;

[0039] Heating: the furnace tube is heated through the heating control system, and the temperature in the furnace is set to 500 °C;

[0040] Pre-pumping: Open the pre-pumping valve to evacuate the furnace tube with built-in graphite boat, set the bottom pressure to 700pa, the time to 10...

Embodiment 3

[0054] Start: The graphite boat filled with silicon wafers after the ALD process is automatically transported to the furnace tube of the tubular PECVD equipment, and the temperature in the furnace is set to 500°C;

[0055] Nitrogen filling: high-purity nitrogen gas is fed into the furnace tube, and the nitrogen flow rate is 5000 sccm, until the pressure of the furnace tube reaches normal pressure and the furnace door is opened, and the temperature in the furnace is set at 500°C;

[0056] Release the boat: Send the graphite boat from the ceramic paddle to the inside of the furnace tube and put it on the support mechanism, close the furnace door, and set the temperature in the furnace to 500°C;

[0057] Heating: the furnace tube is heated by the heating control system, and the temperature in the furnace is set to 480°C;

[0058] Pre-pumping: Open the pre-pumping valve to evacuate the furnace tube with built-in graphite boat, set the bottom pressure to 700pa, the time to 100s, and ...

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PUM

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Abstract

The invention relates to the field of solar battery manufacturing, in particular to a process for reducing scratch of a tubular PERC battery. The process comprises the steps of starting, nitrogen charging, boat placing, heating, pre-pumping, main pumping, leak detection, vacuumizing, constant temperature, constant pressure, deposition, vacuumizing, cleaning, constant temperature I, constant temperature II, nitrogen charging I, boat taking and ending. By means of the process, equipment transformation, newly-added investment and graphite boat transformation are not needed, on the basis of original tubular PECVD equipment plated with a silicon nitride film on the back surface, two-step constant temperature is increased by adjusting the pressure, the pumping speed and the process temperature of the vacuumizing step and the nitrogen charging step before boat discharging, that is, the problem that the EL scratch proportion of a tubular PECVD machine table is too high can be solved in order to slow pressure returning; and compared with the prior art, the process has the advantages that the EL scratch ratio generated by the method is reduced by about half, the technical innovation and large-scale production of the PERC battery can be actively promoted, and the process has relatively good economic benefits and social benefits.

Description

technical field [0001] The invention relates to the field of solar cell manufacturing, in particular to a process for reducing scratches of tubular PERC cells. Background technique [0002] PERC (Passivated Emitter and Rear Cell) technology, that is, passivated emitter and rear cells, uses Al 2 o 3 Passivating the back of the battery with other passivation materials can effectively reduce the recombination of the back surface, increase the open circuit voltage (Voc), increase the reflection of the back surface, and increase the short-circuit current (Isc), thereby improving the conversion efficiency of the battery. Double-sided PERC maintains the high conversion efficiency of the original single-sided PERC, and at the same time, the back side can also generate electricity. Encapsulating the double-sided PERC cell into a double-sided double-glass power generation module can significantly reduce the cost of electricity of the photovoltaic system, and once again improve the pe...

Claims

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Application Information

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IPC IPC(8): H01L31/18H01L31/068C23C16/50C23C16/52C23C16/34
CPCH01L31/1804H01L31/1868H01L31/068C23C16/50C23C16/52C23C16/345Y02E10/547Y02P70/50
Inventor 朱海荣彭平陈庆发郭飞陈磊夏中高李旭杰
Owner 平煤隆基新能源科技有限公司