Production method of electronic-grade aqueous hydrogen peroxide solution

Abstract

The invention provides a production method of an electronic-grade aqueous hydrogen peroxide solution. The production method comprises the steps that a part of aqueous hydrogen peroxide solution is fed from the top of an evaporator (1) and heated by the evaporator (1) and then enters a concentrated solution storage area (12) of the evaporator (1); gas generated in the concentrated solution storage area (12) enters a rectifying tower (2), the rest aqueous hydrogen peroxide solution enters the rectifying tower (2) from a second feeding hole of the rectifying tower (2) and is concentrated by the evaporator (1) and the rectifying tower (2); a part of the combined aqueous hydrogen peroxide solution is pumped into a heat exchanger (13) and cooled to normal temperature and then enters a first-stage reverse osmosis mechanism (16); reverse osmosis liquid obtained after reverse osmosis of the first-stage reverse osmosis mechanism (16) enters a second-stage reverse osmosis mechanism (21); and reverse osmosis liquid obtained after reverse osmosis of the second-stage reverse osmosis mechanism (21) is subjected to ion exchange through an ion exchange device (28) to prepare the electronic-stage aqueous hydrogen peroxide solution.

Description

technical field [0001] The invention relates to the technical field of hydrogen peroxide production, in particular to a production method of an electronic-grade hydrogen peroxide aqueous solution. Background technique [0002] Hydrogen peroxide aqueous solution is also called hydrogen peroxide, which is an important raw material for the production of peroxyacetic acid, thiourea peroxide and other peroxides, and is widely used in medicine, textile printing and dyeing, paper bleaching and other industries. With the development of the electronics industry, electronic grade hydrogen peroxide is used as an important cleaning agent and etchant, and its demand is gradually increasing. [0003] Electronic grade hydrogen peroxide directly affects the performance of integrated circuits and the continuity and stability of their production. Electronic grade hydrogen peroxide aqueous solution is generally obtained from industrial grade hydrogen peroxide aqueous solution through a series...

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Problems solved by technology

[0005] At present, the production of electronic-grade hydrogen peroxide aqueous solution generally has problems such as high energy consumption, high cost, and inflexible production.

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