Flexible piezoresistive sensor based on porous microstructure and preparation method thereof

Abstract

The invention relates to a flexible piezoresistive sensor based on a porous microstructure and a preparation method thereof. The flexible piezoresistive sensor comprises a flexible substrate and an interdigital electrode arranged under the flexible substrate; the upper surface of the flexible substrate is a plane, and the lower surface of the flexible substrate is provided with a plurality of downwards-protruding microstructures; and a plurality of micropores are formed in the flexible substrate. According to the technical scheme, the flexible piezoresistive sensor has good pressure sensitivity, is suitable for detecting human pulse, throat pronunciation and pressure signals of other parts, and has the advantages of being high in sensitivity, low in cost, simple in process, suitable for mass production and the like.

Description

technical field [0001] The invention relates to the technical field of piezoresistive sensors, in particular to a flexible piezoresistive sensor based on a porous microstructure and a preparation method thereof. Background technique [0002] With the rapid development of society and economy and the improvement of people's living standards, more and more people pay great attention to health care issues. With the development of flexible electronic technology, some health data of the human body can be monitored anytime and anywhere by using wearable electronic skin. Traditional sensors mostly use metal and semiconductor devices, which are not suitable for daily wear by the human body and have poor adaptability. The flexible sensor has good biocompatibility, which makes it wearable and real-time monitoring, and has broad prospects in the fields of human-computer interaction, electronic skin and bionic devices. [0003] There are two types of existing flexible piezoresistive se...

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Problems solved by technology

[0003] There are two types of existing flexible piezoresistive sensors. One is to use a surface microstructure (conical, pyramidal, hemispherical). By depositing a conductive layer on the surface, the contact area between the electrode and the surface changes when the force is applied. This structure often only has high sensitivity under low pressure, and it is easy to saturate when the pressure is too high; the other is to make a conductive matrix and form a porous structure inside the matrix. When the pressure is applied, the pores inside the conductive matrix are deformed, causing resistance. change, less conductive path at low pressure due to porosity confinement less sensitive

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