Device and method for improving THz-ATR imaging resolution and performance
A resolution and imaging technology, applied in the field of terahertz imaging, can solve the problems of image quality degradation, focus shift, and low numerical aperture, and achieve the effect of improving imaging resolution, increasing numerical aperture, and reducing interference factors
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Embodiment 1
[0062] The specific implementation manner of the embodiment of the present invention is embodied in a kind of figure 1 In the shown device for improving the resolution and performance of THz-ATR imaging, the device includes: a terahertz radiation source 1; a chopper 2; a terahertz wave splitter 3; a first terahertz detector 4; a first Terahertz wave mirror 5; first off-axis parabolic mirror 6; super hemispherical solid immersion ATR lens 7; sample holder 8; sample to be tested 9; second off-axis parabolic mirror 10; second terahertz wave mirror 11; a second terahertz detector 12; a computer 13.
[0063] The continuous terahertz wave emitted by the terahertz radiation source 1 is converted into a sine wave by the chopper 2 and enters the terahertz beam splitter 3 and is divided into two beams: one beam is reflected light and is directly transmitted by the first terahertz detector 4. collected as the reference signal of the imaging system; the other beam is the transmitted ligh...
Embodiment 2
[0067] A method for improving THz-ATR imaging resolution and performance, see Figure 1-Figure 4 , the method includes the following steps:
[0068] 101: moving the sample 9 to be tested from different positions to the focused spot of the terahertz wave by moving the sample holder 8 two-dimensionally, so as to obtain information on different positions of the sample 9 to be tested;
[0069] 102: The computer 13 collects the signals of the first and second terahertz detectors at the same time, and uses the method of dividing the signal light and the reference light to reduce the influence of the power fluctuation of the radiation source to improve the signal-to-noise ratio of the imaging system. The relative intensity obtained by dividing the sample 9 and the background data is used as the data of each point, and then the ATR image is made.
[0070] Wherein, the above-mentioned step 101 is specifically:
[0071] The computer 13 controls the sample rack 8 to scan with a certain...
Embodiment 3
[0073] The scheme in embodiment 1 and 2 is carried out feasibility verification below in conjunction with specific example, see the following description for details:
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