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High and low temperature impact system

A shock system, high and low temperature technology, applied in measurement devices, instruments, environmental/reliability testing, etc., can solve the problems of chip sample test data deviation, inability to accurately display chip data change trends, frequent temperature changes, etc. Test time, improve test resource utilization, and ensure effectiveness

Pending Publication Date: 2022-03-01
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The temperature changes frequently and the temperature difference is large. The position of the nozzle of the machine and the position of the thermocouple cause a temperature difference between the test chip samples, which leads to deviations in the test data of the chip samples.
[0003] If the test temperature does not reach the specified temperature, the test data of the chip sample read points will deviate, and the data cannot accurately show the data change trend of each read point of the chip sample, which will lead to the interference of subsequent data analysis

Method used

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  • High and low temperature impact system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0042] High and low temperature impact system includes airflow generator, stirring fan, gas hood, test board, thermocouple, programmable logic controller (PLC) and alarm circuit;

[0043] The airflow generator is used to generate airflow at a corresponding temperature;

[0044] The stirring fan is used to stir the airflow generated by the airflow generator evenly and then send it to the air hood, so that there is no large temperature difference in the airflow in the air hood;

[0045] The test board is arranged in the gas hood;

[0046] The test board includes 2 test sockets (Socket);

[0047] The test card socket is used to insert the chip to be tested;

[0048] A first thermocouple is attached to one side of the first test socket;

[0049] A second thermocouple is attached to one side of the second test socket;

[0050] The voltage between the positive and negative poles of the first thermocouple is converted into a first digital temperature value by a digital converter ...

Embodiment 2

[0055] Based on Embodiment 1, the high and low temperature impact system also includes a test controller;

[0056] The test controller is used to send the current target temperature control signal to the airflow generator, and at the same time send the corresponding current target temperature to the third input terminal of the microcontroller;

[0057] The airflow generator is used to generate an airflow of a corresponding temperature according to the current target temperature control signal.

Embodiment 3

[0059] Based on the high and low temperature impact system of Embodiment 1, the first test deck and the second test deck are arranged adjacent to each other;

[0060] The first thermocouple and the second thermocouple are respectively attached to the left side or the right side of the first test holder and the second test holder.

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Abstract

The invention discloses a high-low temperature impact system. A stirring fan stirs airflow generated by an airflow generator and then sends the airflow into an air hood; the test plate is arranged in the gas hood; the test board comprises two test clamping seats; the test card seat is used for inserting a to-be-tested chip; a thermocouple is attached to one side of each of the two test clamping seats; voltages between the positive electrodes and the negative electrodes of the two thermocouples are converted into first digital temperature values through the digital converter, and the first digital temperature values are sent to the microcontroller; and when the absolute values of the difference values between the first digital temperature value and the current target temperature and between the second digital temperature value and the current target temperature are smaller than the set temperature difference, the microcontroller outputs an alarm driving signal to the alarm circuit to drive the alarm circuit to send out an alarm signal. The high and low temperature impact system can accurately and quickly determine whether the temperature in the high and low temperature impact gas hood is stable or not, so that two test chip samples can start to be tested at the specified temperature, and real parameters of the chip samples can be accurately tested and obtained.

Description

technical field [0001] The invention relates to semiconductor detection technology, in particular to a high and low temperature impact system. Background technique [0002] At present, the high and low temperature impact system used in the semiconductor industry uses high and low temperature airflow to directly impact the test sample, because the airflow temperature changes in the process of high and low temperature testing: 25°C → 0°C → -40°C → 125°C → 25°C. The temperature changes frequently and the temperature difference is large. The position of the nozzle of the machine and the position of the thermocouple cause a temperature difference between the test chip samples, which leads to deviations in the test data of the chip samples. [0003] If the test temperature does not reach the specified temperature, the test data of the chip sample read point will deviate, and the data cannot accurately show the data change trend of each read point of the chip sample, which will lea...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/26G01R31/00
CPCG01R31/2642G01R31/003
Inventor 郭伟程铖吴奇伟尹彬锋
Owner SHANGHAI HUALI MICROELECTRONICS CORP