Cluster ion beam nanometer processing equipment and processing method thereof

Abstract

The invention provides cluster ion beam nano-processing equipment. The cluster ion beam nano-processing equipment comprises a feeding device, a graded negative pressure generator, a spindle motor, a pressure cavity, a material pretreatment unit, a nano-cluster ion beam unit, a nano-cluster particle size real-time detection unit, a discharging device and an electrical control system, the invention also provides a cluster ion beam nano-processing method which comprises the following steps: pretreating the material, and grinding the material into a free abrasive material; the particle size of the free abrasive is detected in real time, and when the free abrasive reaches the submicron level, deflection, acceleration and collision processing are conducted, and the free abrasive is decomposed into nanoclusters; and detecting the particle size of the nanocluster in real time, and discharging when a set condition is met. According to the method, the particle size of the nanocluster is detected in real time, so that the consistency and stability of the particle size of the nanocluster are ensured; a processing mode of combining free abrasive pretreatment and nanocluster energy beam collision is adopted, so that the particle size and purity requirements of the nano material are ensured, and component deviation and phase pollution are reduced to the maximum extent.

Description

technical field [0001] The invention relates to the field of nanometer material processing, in particular to a cluster ion beam nanometer processing equipment and a processing method thereof. Background technique [0002] Nanomaterials, also known as ultra-microcrystalline materials, have a cluster particle size ranging from 1nm to 100nm and have unique and excellent physical properties such as small size effect, quantum effect, interface effect and surface effect. , chemical industry, medicine and other fields have broad application prospects. In the past ten years, the preparation methods, performance tests and theoretical explanations of nanomaterials have become a hot topic of research in various countries, and fruitful theoretical and applied research results have been achieved. [0003] As far as the processing technology of nanomaterials is concerned, there are mainly physical evaporation condensation method, mechanical ball milling method, molecular beam epitaxy met...

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Problems solved by technology

[0009] In order to overcome the deficiencies of the prior art, the object of the present invention is to provide a cluster ion beam nano-processing equipment and its processing method, aiming to solve the problems of component deviation, phase contamination, inability to Performance measurement and evaluation of nanoclusters in real time

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