Intelligent regulation and control method and system based on Q-time tolerant interval station disconnection

Abstract

An intelligent regulation and control method based on Q-time tolerant interval station disconnection comprises the steps that three layers of Q-time intervals connected end to end are combined, a nested Q-time tolerant interval is formed, and a regulation and control mode judged according to the risk level after a starting station and a downstream disconnection station are combined is obtained; aiming at each Lot, detecting the equipment condition of each operation site in the multi-layer Q-time tolerance interval; for each Lot, simulating and predicting the workable condition of a device operation program corresponding to each site in the multi-layer Q-time tolerance interval; for each Lot, simulating and predicting information of each operation site in the multi-layer Q-time tolerance interval; and storing disconnection information of each work station in the Q-time tolerance interval, marking the regulation and control mode, forming a running path (Run Path) set which is used for mapping each station in the Q-time tolerance interval by a wafer manufacturing unit product (Lot), and judging whether dispatching can be carried out or not. According to the method, the dispatching accuracy can be improved, human error pre-judgment is reduced, the re-operation probability is reduced, the idle time after equipment is reset is shortened, and the product circulation rate and the production cycle are improved.

Description

technical field [0001] The present invention relates to the technical field of semiconductor manufacturing, in particular to an intelligent control method and system based on a Q-time tolerance time interval site disconnection. Background technique [0002] Due to the process requirements in the semiconductor integrated circuit wafer manufacturing process, the longest waiting time (Queue Time, Q-time) needs to be set at some sites, especially key sites, and it is required to go from a certain site (Q-time starting site) to Between another station (Q-time end station), it is necessary to enter the Q-time end station machine for operation within the set time; if the set time exceeds the set time and does not enter the machine work at the Q-time end station, the wafer manufacturing unit The product (Lot) has the risk of being scrapped or reworked (Rework), which leads to an increase in wafer production costs and even affects the timely delivery of products. [0003] Therefore,...

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Problems solved by technology

[0007] The first purpose of the present invention is to aim at the prior art, the traditional wafer manufacturing unit product (Lot) relies on the production line personnel to judge whether the downstream site is disconnected when scheduling the Q-time initial site, and checks the operation of each site by experience or manual appointment When the production line changes suddenly, the Q-time interval changes or the process is updated, the relevant information cannot be obtained systematically, which leads to the risk of scrapping and re-operation of the wafer manufacturing unit product (Lot); when the equipment plan During maintenance, use experience to determine when the wafer manufacturing unit product (Lot) is not in operation at the Q-time start site, resulting in the risk of scrapping and re-operation of the wafer manufacturing unit product (Lot) within the Q-time time interval; It is impossible to scientifically predict the resumption time when resuming the machine, so that it is impossible to release the goods at the Q-time starting site in time, resulting in the inability of the downstream equipment to work when resuming the machine, causing the equipment to be idle, thus affecting the production capacity and other defects. Provide a Q-time based capacity Intelligent control method for station disconnection in time interval

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