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Method for characterizing electrical characteristics of transparent conductive film based on full-spectrum method

A transparent conductive film, full spectrum technology, applied in the field of characterizing the electrical characteristics of transparent conductive films based on full spectrum method, can solve the problems of large influence of film resistivity, high damage risk and high requirements

Active Publication Date: 2022-04-12
TIANJIN JINHANG INST OF TECH PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] At this stage, the indirect characterization of the spectroscopic method uses a single short-wave and medium-wave spectral characterization, and there is no characterization of the ultraviolet-visible-infrared broadband optical constants for the conductive film film. The single-band spectral characterization of the film resistivity is not only affected by the thickness of the thin layer The impact is large, and there is a large error, so Hall effect tester and four-probe tester are often used to test the electrical characteristics of the film. However, the Hall effect tester has special requirements for samples, and the test is cumbersome. The method of testing the sheet resistance of a thin film needs to place a needle on the surface of the film, and there is a risk of damage to the sample
Therefore, a characterization method based on the full spectrum method for the electrical characteristics of transparent conductive films is proposed to solve the above-mentioned problems of high requirements and high risk of damage to film test samples

Method used

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  • Method for characterizing electrical characteristics of transparent conductive film based on full-spectrum method
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  • Method for characterizing electrical characteristics of transparent conductive film based on full-spectrum method

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Experimental program
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Embodiment 1

[0043] Characterization of electrical characteristics of transparent conductive film ITO by full spectrum method

[0044] S1. Prepare an ITO transparent conductive film sample on a double-sided polished sample, and the transparent area of ​​the substrate needs to be within the test wavelength range;

[0045] S2. Measure the transmission spectrum and reflection spectrum of the ITO thin film sample on the quartz substrate in the ultraviolet-visible light band and infrared band;

[0046] S3. Use the Cody-Lorentz and Gaussian dispersion oscillator model to characterize the energy band transition and oxygen vacancy characteristics in the short-wave direction;

[0047] S4. Use the Drude oscillator model to characterize the free electron characteristics of ITO thin film samples in the long-wave direction;

[0048] S5. Taking the transmission spectrum and reflection spectrum of the ultraviolet-visible light band and infrared band as the inversion calculation target, using the model i...

Embodiment 2

[0056] Characterization of Electrical Characteristics of Ultrathin Metal Films by Full Spectroscopy

[0057] S1. Prepare ultra-thin Ag film samples on double-sided polished quartz substrates. In order to prevent the ultra-thin Ag films from being oxidized, the film structure of Sub / D / M / D / is adopted, D is a dielectric film, and M is a metal film.

[0058] S2 Test the transmission spectrum and reflection spectrum of the ultra-thin metal film sample on the quartz substrate in the ultraviolet-visible light band and infrared band; S3. Use Cody-Lorentz to establish a multi-oscillator dispersion model to characterize the energy band transition characteristics in the short-wave direction;

[0059] S4. Using the Drude oscillator model to characterize the characteristics of free electrons in the long-wave direction;

[0060] S5. Taking the transmission spectrum and reflection spectrum in the ultraviolet-visible and infrared bands as the inversion calculation target, using the Cody-Lore...

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Abstract

The invention discloses a method for characterizing electrical characteristics of a transparent conductive film based on a full spectrum method. A dispersion model of the conductive film is constructed by constructing a multi-vibrator model, and electrical characteristics of the conductive film and accurate optical constant characterization of a wide spectrum are analyzed by using a film optical constant inversion calculation method. The method is suitable for characterization of electrical characteristics and wide-spectrum accurate optical constants of transparent conductive films such as ITO, AZO, infrared transparent conductive films, ultrathin metal films (the thickness of the film layer is smaller than 100 nm) and the like, the testing steps of the photoelectric characteristics of the transparent conductive films are simplified, the working efficiency is improved, and a guarantee is provided for design of electromagnetic shielding and intelligent light window films.

Description

technical field [0001] The present disclosure generally relates to the technical field of optical thin films, and specifically relates to a method for characterizing the electrical characteristics of a transparent conductive film based on a full spectrum method. Background technique [0002] The transparent conductive film has a high transmittance in the visible light band, exhibits metallic properties in the infrared band, and has the characteristics of low emissivity. In military applications, the transparent conductive film is coated on the surface of the optical window of the stealth target for window heating and The function of reducing the radar scattering area of ​​the optical window can achieve the purpose of defrosting, defogging and stealth. The accurate characterization of its optical constant and resistivity is of great significance for the preparation of optical windows for stealth targets such as stealth fighters and missiles. [0003] At this stage, the indire...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/552G01N21/59G01N21/33G01N21/3563
Inventor 刘华松何家欢姜玉刚刘丹丹陈丹徐颖梁楠
Owner TIANJIN JINHANG INST OF TECH PHYSICS