Ion transport layer for inorganic electrochromism and preparation method of assembly composite membrane system
An ion transport layer and electrochromic technology, applied in nonlinear optics, instruments, optics, etc., can solve the problems of high energy consumption and low film production efficiency, and achieve the effects of high efficiency, low cost and high ion mobility
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Embodiment 1
[0019] The preparation of the composite film system includes the following steps:
[0020] (1) Preparation of electrochromic layer: use 5-50Ω / sq ITO or FTO glass as the coating substrate, and prepare WO on the substrate by magnetron sputtering 3 The base material film, the sputtering target is metal W target or metal W, Ti alloy target, etc. (the content of alloy elements other than metal W is 1% to 15%), the sputtering power is 500 to 2000W, and the sputtering pressure is 0.2~2.0Pa; the argon-oxygen gas flow ratio is 10:1~1:1, and the preparation thickness is controlled to be 100~500nm.
[0021] (2) Preparation of ion transport layer: TCO glass layer / WO prepared by magnetron sputtering method 3 Preparation of AlPO on base film 4 base film. AlPO 4 The ceramic target is used as a sputtering target, and is coated with radio frequency magnetron sputtering. Power 200W~1000W, sputtering pressure 0.1Pa~1.0Pa, control thickness 100~600nm.
[0022] (3) Preparation of ion storage...
Embodiment 2
[0025] The preparation of the composite film system includes the following steps:
[0026] (1) Preparation of electrochromic layer: use 5-50Ω / sq ITO or FTO glass as the coating substrate, and prepare WO on the substrate by magnetron sputtering 3 The base material film, the sputtering target is metal W target or metal W, Ti alloy target, etc. (the content of alloy elements other than metal W is 1% to 15%), the sputtering power is 500 to 2000W, and the sputtering pressure is 0.2~2.0Pa; the argon-oxygen gas flow ratio is 10:1~1:1, and the preparation thickness is controlled to be 100~500nm.
[0027] (2) Preparation of ion transport layer: TCO glass layer / WO prepared by chemical liquid phase deposition 3 Preparation of AlPO on base film 4 base film. Preparation of Li+-doped AlPO with isopropanol as solvent and aluminum isopropoxide, lithium perchlorate, and phosphoric acid as precursors 4 Coating sol, the Li+ doping concentration is 1.0% to 10%. Preparation of Li+-doped AlPO ...
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