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Flexible piezoelectric sensing/driving dual-purpose device with intermediate electrode and preparation method of flexible piezoelectric sensing/driving dual-purpose device

An intermediate electrode, piezoelectric sensing technology, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, materials for piezoelectric devices or electrostrictive devices Selecting other directions can solve the problems of ineffective process control, difficult batch automatic production, difficult actual preparation, etc., and achieve the effect of large flexibility, good piezoelectricity, and improved driving efficiency.

Pending Publication Date: 2022-04-12
HUNAN UNIV OF SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The preparation method has cumbersome steps, difficult actual preparation, high requirements for equipment, ineffective process control, low efficiency, and difficulty in batch automated production

Method used

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  • Flexible piezoelectric sensing/driving dual-purpose device with intermediate electrode and preparation method of flexible piezoelectric sensing/driving dual-purpose device
  • Flexible piezoelectric sensing/driving dual-purpose device with intermediate electrode and preparation method of flexible piezoelectric sensing/driving dual-purpose device
  • Flexible piezoelectric sensing/driving dual-purpose device with intermediate electrode and preparation method of flexible piezoelectric sensing/driving dual-purpose device

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Embodiment Construction

[0045] The present invention will be described in further detail below in conjunction with the accompanying drawings and actual cases.

[0046] Such as figure 1 As shown, the flexible piezoelectric sensing / driving dual-purpose device with an intermediate electrode provided by the present invention mainly includes: an upper packaging layer 1 , a flexible piezoelectric functional material 2 , a lateral lead-out electrode 3 , and a lower packaging layer 4 .

[0047] Such as figure 2 As shown, the device structure of the flexible piezoelectric sensing / driving dual-purpose device with an intermediate electrode provided by the present invention.

[0048] Such as image 3 As shown, the device structure of the flexible piezoelectric sensing / driving dual-purpose device with an intermediate electrode provided by the present invention.

[0049] Such as Figure 4 Shown is a schematic diagram of the structure of the flexible piezoelectric functional material.

[0050] Such as Figur...

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Abstract

The invention discloses a flexible piezoelectric sensing / driving dual-purpose device with an intermediate electrode and a preparation method of the flexible piezoelectric sensing / driving dual-purpose device. The flexible piezoelectric sensing / driving dual-purpose device comprises a flexible piezoelectric functional material layer with an intermediate electrode, a lateral extraction electrode and a flexible insulation packaging layer, the device structure comprises an upper flexible insulation packaging layer, a flexible piezoelectric function material layer, a left lateral extraction electrode, a right lateral extraction electrode and a lower flexible insulation packaging layer from top to bottom. The flexible piezoelectric functional material is composed of micron piezoelectric ceramic columns arranged in longitudinal and transverse arrays, a flexible intermediate electrode and a polymer adhesive. The preparation method of the sensing / driving dual-purpose device mainly comprises a piezoelectric functional material preparation method, a lateral extraction electrode preparation and assembly method and a dual-purpose device packaging method. According to the flexible piezoelectric functional material with the middle electrode, the piezoelectric ceramic column is polarized in the direction perpendicular to the middle electrode, the d33 piezoelectric constant of the piezoelectric ceramic column is effectively adopted during sensing and driving, the sensing / driving sensitivity of the piezoelectric functional material is greatly enhanced, and the device is compact in overall structure, good in flexibility and stable in performance. The sensor can be well coupled with a curved surface structure to serve as a stress / strain sensor, and an excitation signal can also be input for active vibration suppression of a driver.

Description

technical field [0001] The invention relates to a flexible piezoelectric sensing / driving dual-purpose device with an intermediate electrode and a preparation method thereof. The piezoelectric sensing / driving dual-purpose device is used for plate structure damage monitoring and plate structure vibration suppression. Background technique [0002] Piezoelectric materials are new smart materials developed in recent years, and have been widely used in the fields of optics, electronics, aerospace, machinery manufacturing, bioengineering, and robotics. Traditional piezoelectric ceramic sensors are generally large in size and sensitive to electrical noise. Moreover, the flexibility is low and it is not easy to attach to the curved surface structure, while the flexible piezoelectric ceramic / polymer composite material inherits the advantages of high piezoelectricity of piezoelectric ceramics, low ferroelectricity or pyroelectricity and high Curie point, and at the same time due to the ...

Claims

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Application Information

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IPC IPC(8): H01L41/113H01L41/18H01L41/047H01L41/053H01L41/33
Inventor 沈意平蒋帅王送来欧云肖俐含刘翊周剑李海江
Owner HUNAN UNIV OF SCI & TECH
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