Flexible piezoelectric sensing/driving dual-purpose device with intermediate electrode and preparation method of flexible piezoelectric sensing/driving dual-purpose device

Abstract

The invention discloses a flexible piezoelectric sensing/driving dual-purpose device with an intermediate electrode and a preparation method of the flexible piezoelectric sensing/driving dual-purpose device. The flexible piezoelectric sensing/driving dual-purpose device comprises a flexible piezoelectric functional material layer with an intermediate electrode, a lateral extraction electrode and a flexible insulation packaging layer, the device structure comprises an upper flexible insulation packaging layer, a flexible piezoelectric function material layer, a left lateral extraction electrode, a right lateral extraction electrode and a lower flexible insulation packaging layer from top to bottom. The flexible piezoelectric functional material is composed of micron piezoelectric ceramic columns arranged in longitudinal and transverse arrays, a flexible intermediate electrode and a polymer adhesive. The preparation method of the sensing/driving dual-purpose device mainly comprises a piezoelectric functional material preparation method, a lateral extraction electrode preparation and assembly method and a dual-purpose device packaging method. According to the flexible piezoelectric functional material with the middle electrode, the piezoelectric ceramic column is polarized in the direction perpendicular to the middle electrode, the d33 piezoelectric constant of the piezoelectric ceramic column is effectively adopted during sensing and driving, the sensing/driving sensitivity of the piezoelectric functional material is greatly enhanced, and the device is compact in overall structure, good in flexibility and stable in performance. The sensor can be well coupled with a curved surface structure to serve as a stress/strain sensor, and an excitation signal can also be input for active vibration suppression of a driver.

Description

technical field [0001] The invention relates to a flexible piezoelectric sensing / driving dual-purpose device with an intermediate electrode and a preparation method thereof. The piezoelectric sensing / driving dual-purpose device is used for plate structure damage monitoring and plate structure vibration suppression. Background technique [0002] Piezoelectric materials are new smart materials developed in recent years, and have been widely used in the fields of optics, electronics, aerospace, machinery manufacturing, bioengineering, and robotics. Traditional piezoelectric ceramic sensors are generally large in size and sensitive to electrical noise. Moreover, the flexibility is low and it is not easy to attach to the curved surface structure, while the flexible piezoelectric ceramic / polymer composite material inherits the advantages of high piezoelectricity of piezoelectric ceramics, low ferroelectricity or pyroelectricity and high Curie point, and at the same time due to the ...

AI Technical Summary

Problems solved by technology

The preparation method has cumbersome steps, difficult actual preparation, high requirements for e

Images