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Surface treatment process and processing equipment for quartz crucible

A quartz crucible and surface processing technology, applied in the field of surface treatment technology and processing equipment of quartz crucible, can solve problems such as inconvenience in processing and production, inconvenience in running smoothly, inconvenience in mixing and soaking reaction work, etc., and achieves the effect of improving efficiency and facilitating surface drying

Active Publication Date: 2022-04-15
连云港福典石英科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

A quartz crucible capable of rapid heat conduction according to the present invention is provided with a crucible tong ring groove, a ceramic inner crucible and a combined flip cover, which can facilitate the crucible tongs to pick up the crucible, and can increase the thermal conductivity of the crucible without affecting While the heat in the crucible is dissipated, it can prevent the heated object from splashing out, which brings better application prospects. However, this patent is inconvenient for a stable and limited connection, and needs to be improved.
[0006] But the surface treatment process and processing equipment of the existing quartz crucible still have some deficiencies in the process of use, for example: it is not convenient to carry out mixing and immersion reaction work, it is not easy to It is convenient to carry out the production of quartz crucible, and at the same time it is not convenient to carry out integrated processing and production, and it cannot achieve smooth operation to a greater extent. Therefore, a surface treatment process and processing equipment for quartz crucible are needed to solve the above-mentioned problems.

Method used

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  • Surface treatment process and processing equipment for quartz crucible
  • Surface treatment process and processing equipment for quartz crucible
  • Surface treatment process and processing equipment for quartz crucible

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0052] A kind of quartz crucible, its surface treatment process comprises the following steps:

[0053] S1. First, use a sandblasting machine to perform sandblasting on the outer surface of the quartz crucible. The nozzle of the sandblasting machine is 30° from the surface of the quartz crucible, and the distance from the quartz surface is 20 cm to obtain a quartz crucible with an average surface roughness Ra of 8 μm. ;

[0054] S2. Rinse the quartz crucible after sandblasting and cutting with tap water, and after rinsing, place it upside down on the shelf to drench off the water droplets on the surface;

[0055] S3. Place the washed quartz crucible in the treatment solution and soak for 60 minutes, and keep the temperature of the treatment solution at 35° C. to ensure that the treatment solution fully reacts with the surface of the quartz crucible;

[0056] S4, take out the quartz crucible soaked in the treatment solution, and rinse with deionized water;

[0057] S5. Baking...

Embodiment 2

[0060] A kind of quartz crucible, its surface treatment process comprises the following steps:

[0061] S1. First, use a sandblasting machine to perform sandblasting on the outer surface of the quartz crucible. The nozzle of the sandblasting machine is at 45° to the surface of the quartz crucible, and the distance from the quartz surface is 25 cm to obtain a quartz crucible with an average surface roughness Ra of 7 μm. ;

[0062] S2. Rinse the quartz crucible after sandblasting and cutting with tap water, and after rinsing, place it upside down on the shelf to drench off the water droplets on the surface;

[0063] S3. Soak the washed quartz crucible in the treatment solution for 60-90 minutes, and keep the temperature of the treatment solution at 40° C. to ensure that the treatment solution fully reacts with the surface of the quartz crucible;

[0064] S4, take out the quartz crucible soaked in the treatment solution, and rinse with deionized water;

[0065] S5. Baking the r...

Embodiment 3

[0068] A kind of quartz crucible, its surface treatment process comprises the following steps:

[0069] S1. First, use a sandblasting machine to perform sandblasting on the outer surface of the quartz crucible. The nozzle of the sandblasting machine is 60° from the surface of the quartz crucible, and the distance from the quartz surface is 30 cm to obtain a quartz crucible with an average surface roughness Ra of 10 μm. ;

[0070] S2. Rinse the quartz crucible after sandblasting and cutting with tap water, and after rinsing, place it upside down on the shelf to drench off the water droplets on the surface;

[0071] S3. Soak the washed quartz crucible in the treatment solution for 90 minutes, and keep the temperature of the treatment solution at 50° C. to ensure that the treatment solution fully reacts with the surface of the quartz crucible;

[0072] S4, take out the quartz crucible soaked in the treatment solution, and rinse with deionized water;

[0073] S5. Baking the rins...

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PUM

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Abstract

The invention relates to the technical field of quartz crucible production equipment, in particular to a surface treatment process and processing equipment for a quartz crucible, and the process comprises the following steps: carrying out sand blasting treatment on the outer surface of the quartz crucible by adopting a sand blasting machine; washing the quartz crucible subjected to sand blasting cutting with tap water, and reversely covering the washed quartz crucible on a frame to spray water drops on the surface; the washed quartz crucible is placed in a treating fluid to be soaked; taking out the quartz crucible soaked in the treating fluid, and leaching with deionized water; the washed crucible is baked, and the next packaging procedure can be carried out after baking is finished; comprising a soaking production structure, a spraying structure and a heating production part. According to the surface treatment process disclosed by the invention, the quartz crucible has the surface with uniform roughness, no sand blasting, no peak and no crack; and the processing equipment can perform assembly line type processing production, so that the production efficiency of an enterprise is greatly improved.

Description

technical field [0001] The invention relates to the technical field of quartz crucible production equipment, in particular to a surface treatment process and processing equipment for a quartz crucible. Background technique [0002] Quartz crucibles can be used below 1450 degrees, and are divided into transparent and opaque. The translucent quartz crucible made by arc method is an indispensable basic material for drawing large-diameter single crystal silicon and developing large-scale integrated circuits. Today, the world's semiconductor industry Developed countries have replaced small transparent quartz crucibles with this crucible, which has the advantages of high purity, strong temperature resistance, large size and high precision, good heat preservation, energy saving, and stable quality. [0003] According to Chinese Patent No. CN202022805869.7, the utility model discloses a quartz crucible for a single crystal furnace, a crucible assembly and a single crystal furnace. T...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03C15/00C03C23/00
CPCY02P40/57
Inventor 张家典
Owner 连云港福典石英科技有限公司
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