Silicon-based OLED display substrate
A technology for displaying substrates and substrates, applied in vacuum evaporation plating, coating, electric solid devices, etc., can solve problems such as packaging failure, abnormal yield rate, and particle impact, so as to improve product yield, reduce the number of particles, and avoid Effect of Package Failure Risk
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[0038] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, only some structures related to the present invention are shown in the drawings but not all structures.
[0039] As mentioned in the background technology, the existing silicon-based OLED products are seriously affected by particles, and there are technical problems such as abnormal yield rate and packaging failure. After careful research, the inventor found that the reason for this technical problem is that figure 1 is a schematic diagram of the position of the particle existing area in the prior art, see figure 1 , in the existing silicon-based OLED production process, the particles produced by evaporation account f...
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