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Method for detecting thickness of surface corrosion layer of electronic component

A technology of electronic components and detection methods, applied in the field of analysis and detection, can solve the problems of difficult sample preparation, high detection limit of elements, inability to accurately obtain the thickness of corrosion layer, etc., and achieve simple and convenient detection steps, high detection sensitivity and low cost low effect

Pending Publication Date: 2022-04-29
CHINA ELECTRONICS PROD RELIABILITY & ENVIRONMENTAL TESTING RES INST THE FIFTH ELECTRONICS RES INST OF MIITCEPREI LAB
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0011] However, this method is difficult to prepare samples, and the detection limit of elements is relatively high, which can only be detected when the concentration is above 1%, and it is impossible to accurately obtain the trace thickness of the corrosion layer

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  • Method for detecting thickness of surface corrosion layer of electronic component
  • Method for detecting thickness of surface corrosion layer of electronic component
  • Method for detecting thickness of surface corrosion layer of electronic component

Examples

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Embodiment 1

[0071] This embodiment provides a kind of detection method of the thickness of corrosion layer on the surface of electronic components and parts, the sample of detection is: the copper sheet that the purity inside electronic device is 99.9%, corrosion occurs on the surface of this copper sheet (such as figure 1 and figure 2 Shown), the thickness of the corrosion layer is required to be tested.

[0072] The specific detection method is as follows:

[0073] S1: Fix the above-mentioned copper sheet (the surface height difference does not exceed 0.5 μm) on the surface of the sample stage, put it into the auxiliary chamber of the IonTOF time-of-flight secondary ion mass spectrometer, and vacuum until the vacuum degree reaches 4.7×10 -7 After mbar, send the sample into the main chamber;

[0074] S2: Wait until the vacuum degree of the main chamber reaches 9.0×10 -9 After mbar, turn on the LMIG power supply, Analyzer power supply and 2ndGun power supply, load the LMIG source, cal...

Embodiment 2

[0082] The present embodiment provides a kind of detection method of the thickness of corrosion layer on the surface of electronic components and parts, and the sample of detection is: the ceramic capacitor (see Figure 6 ), it is required to test the thickness of the corrosion layer of the terminal electrode.

[0083] The specific detection method is as follows:

[0084]S1: Fix the above-mentioned ceramic capacitor (the surface height difference does not exceed 0.5 μm) on the surface of the sample stage, put it into the auxiliary chamber of the Ion TOF time-of-flight secondary ion mass spectrometer, and vacuum until the vacuum degree reaches 6.4× 10 -7 After mbar, send the sample into the main chamber;

[0085] S2: Wait until the vacuum degree of the main chamber reaches 1.2×10 -8 After mbar, turn on the LMIG power supply, Analyzer power supply and 2ndGun power supply, load the LMIG source, calibrate the beam current of the LMIG source, and adjust the beam current size: 0....

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Abstract

The invention discloses a method for detecting the thickness of a surface corrosion layer of an electronic component, and belongs to the technical field of analysis and detection. According to the method, a flight time secondary ion mass spectrometer is adopted to carry out corrosion element positioning on the surface of a to-be-detected electronic component sample, sample surface component information is collected, corrosion elements are confirmed, then longitudinal depth analysis is carried out, and when the number of atoms of the corrosion elements does not change along with the stripping depth or the corrosion elements cannot be detected, the corrosion elements are determined. And taking the stripping depth as the thickness of the corrosion layer. The method has the advantages of simple detection steps, low cost, no need of extra sample preparation, high detection efficiency, high detection sensitivity reaching ppm to ppb, nano-scale precision, accurate acquisition of the thickness of the corrosion layer, and great application prospects in the aspects of quality evaluation, reliability evaluation, failure analysis and the like of miniature components.

Description

technical field [0001] The invention relates to the technical field of analysis and detection, in particular to a method for detecting the thickness of a corrosion layer on the surface of an electronic component. Background technique [0002] With the rapid development of information technology, the integration and miniaturization of electronic components has become a trend. A very small amount of adsorbed liquid film or corrosion products will affect the performance of electronic components, and the corrosion failure of electronic components is becoming more and more serious. protrude. [0003] At present, the environmental corrosion research on typical metal materials used in electronic components such as contacts, connectors and integrated circuits in electronic equipment shows that in most industrial ambient air, there are three main types of gases that cause metal corrosion in electronic equipment: SO 2 、H 2 S. NO x Etc acid gas, NH 3 Alkaline gas and O 3 Oxidizing...

Claims

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Application Information

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IPC IPC(8): G01N27/64G01B7/06
CPCG01N27/64G01B7/06
Inventor 肖运彬陈兰彭博徐焕翔刘子莲朱刚
Owner CHINA ELECTRONICS PROD RELIABILITY & ENVIRONMENTAL TESTING RES INST THE FIFTH ELECTRONICS RES INST OF MIITCEPREI LAB
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