Visual vacuum cathode magnetic filtering device

Abstract

The visual vacuum cathode magnetic filtering device comprises a pipeline, at least one first inlaying opening is formed in the pipeline, a transparent plate is embedded in the first inlaying opening, the transparent plate extends in the length direction of the pipeline, the transparent plate and the first inlaying opening are relatively fixed in a sealed mode, the transparent plate is of a double-layer transparent structure, and the first inlaying opening and the second inlaying opening are oppositely fixed. The transparent plate comprises an inner-layer transparent plate and an outer-layer transparent plate, a first cooling water channel is formed in the space between the inner-layer transparent plate and the outer-layer transparent plate, a water inlet and a water outlet are formed in the outer-layer transparent plate, and the water inlet and the water outlet are communicated with the first cooling water channel. According to the design, the transparent plate is designed on the pipeline, so that directional quantitative analysis of experimental parameters on target surface arc spot movement, metal or gas ionization rate, plasma density, metal ionization energy and coating performance can be better observed and measured, and the process design can be improved and updated.

Description

technical field [0001] The invention relates to the field of vacuum coating, in particular to a visualized vacuum cathode magnetic filter device. Background technique [0002] Vacuum coating is a method of evaporating or sputtering metals, alloys or compounds in a vacuum to solidify and deposit them on the coated object (called substrate, substrate or substrate), including vacuum ion evaporation, magnetron sputtering There are many kinds of radiation, MBE molecular beam epitaxy, PLD laser sputtering deposition, etc., and the main implementation carrier is a vacuum coating machine. [0003] With the rapid development of coating applications and new technologies, the development of new high-hardness, high-strength, drop-free high-precision coatings is crucial to the control of coating process technical parameters. At present, most imported equipment has no observation window, while domestic equipment has an observation window on the furnace door, which is extremely small in s...

AI Technical Summary

Problems solved by technology

The influence mechanism of coating process parameters on arc ignition, arc spot movement on the target surface, metal or gas ionization rate, plasma density, metal ionization energy, coating performance, etc. Generally speaking, the monitoring means of the coating process are very limited. After completion, performance testing or small window observation, or theoretical speculation and simulation are obtained, and there is no direct, large-area visualization equipment for monitoring

Under such conditions, the introduction of many process technologies, such as bias voltage and magnetic field filtering, requires a large amount of simulation analysis, experimental data and cost input.

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