Electrostatically-driven MEMS comb tooth structure, micromirror adopting structure and preparation method of micromirror

Abstract

The invention discloses an electrostatic driving MEMS comb tooth structure, a micromirror adopting the structure and a preparation method of the micromirror. According to the electrostatic driving MEMS comb tooth structure, the surfaces of comb teeth are provided with insulating layers, and the insulating layers on the surfaces of the adjacent comb teeth are the same kind of insulating layers or different insulating layers; the micro-mirror adopting the electrostatic driving MEMS comb tooth structure is sequentially composed of a substrate, an isolation layer and a device layer from bottom to top. According to the manufacturing method of the micromirror, the insulating layer is manufactured by adopting a high-temperature oxidation method, a plasma enhanced chemical vapor deposition method, a low-pressure chemical vapor deposition method, a normal-pressure chemical vapor deposition method, a physical deposition method, an atomic layer deposition method or a step-by-step heterogeneous deposition method; the same or different insulating layers are obtained on the surfaces of the driving comb teeth and the surfaces of the grounding comb teeth; when the driving comb teeth and the grounding comb teeth generate adsorption, insulating layers on the surfaces of the two comb teeth are contacted, short circuit is not formed, and a good insulating effect is achieved. The electrostatic drive type MEMS micromirror capable of preventing adsorption damage is compact in structure and simple in process.

Description

Technical field [0001] The present invention relates to the field of MEMS technology of microelectromechanical systems, in particular to an electrostatic drive MEMS comb structure, a micromirror using this structure and a preparation method thereof. Background [0002] The comb structure of electrostatic drive is a class of micro-drive structures widely used in microelectromechanical system (MEMS) sensors, drivers and actuators. Electrostatic drive comb structure generally contains at least one set of drive comb teeth and a set of grounded comb teeth; The drive comb and grounded comb groups are staggered, in the shape of a fork finger, that is, each drive comb is adjacent to the ground comb, each grounded comb on both sides is the drive comb, and the adjacent comb teeth maintain a certain distance between each other, and do not contact each other. The drive comb group is connected to the drive voltage, the ground comb group is connected to the ground wire, and the relative displa...

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Problems solved by technology

Figure 1(b) shows that the driving comb 200 connected to the driving voltage Vd is tilted and is in contact with the grounding comb 100. Since there is no insulating layer on the surface of the two combs, the driving comb 200 and the grounding comb 100 are both conductive, and the resistance Very small, so in this state, the driving voltage is short-circuited with the ground wire, resulting in an instantaneous large current, high temperature or even sparks and local explosions in the contact area between the driving comb 200 and the grounding comb 100, resulting in damage to the comb

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