Electrostatically driven mems comb-tooth structure, micromirror using the structure and preparation method thereof

Abstract

Electrostatically driven MEMS comb-tooth structure, micromirror using the same, and preparation method thereof; electrostatically driven MEMS comb-tooth structure, the surface of the comb-tooth has an insulating layer, and the insulating layers on the surfaces of adjacent comb-tooths are the same insulating layer or different insulating layers The micromirror using the electrostatically driven MEMS comb-tooth structure is composed of a substrate, an isolation layer and a device layer from bottom to top; the fabrication method of the micromirror adopts high temperature oxidation, plasma enhanced chemical vapor deposition, low pressure chemical vapor deposition, atmospheric pressure chemical vapor deposition Deposition, physical deposition, atomic layer deposition or step-by-step heterogeneous deposition to make insulating layers; that is, the same or different insulating layers are obtained on the surfaces of the driving comb teeth and the grounding comb teeth; when the driving comb teeth and the grounding comb teeth are adsorbed, then The insulating layers on the surfaces of the two are in contact without forming a short circuit and have good insulating effect; the electrostatically driven MEMS micromirror for preventing adsorption damage of the present invention has a compact structure and a simple process.

Description

technical field [0001] The invention relates to the technical field of micro-electromechanical systems (MEMS), in particular to an electrostatically driven MEMS comb-tooth structure, a micromirror using the structure and a preparation method thereof. Background technique [0002] Electrostatically actuated comb structures are a class of micro-actuated structures that are widely used in microelectromechanical systems (MEMS) sensors, actuators, and actuators. The electrostatic driving comb structure generally includes at least one set of driving combs and one set of grounding combs; the driving combs and the grounding combs are staggered and interdigitated, that is, the adjacent two sides of each driving comb are grounding combs The two sides of each grounding comb are driving combs, and adjacent combs maintain a certain distance and do not touch each other. The driving comb tooth group is connected with the driving voltage, and the grounding comb tooth group is connected wit...

AI Technical Summary

Problems solved by technology

Figure 1(b) shows that the driving comb 200 connected to the driving voltage Vd is tilted and is in contact with the grounding comb 100. Since there is no insulating layer on the surface of the two combs, the driving comb 200 and the grounding comb 100 are both conductive, and the resistance Very small, so in this state, the driving voltage is short-circuited with the ground wire, resulting in an instantaneous large current, high temperature or even sparks and local explosions in the contact area between the driving comb 200 and the grounding comb 100, resulting in damage to the comb

Images