Waste gas treatment device

A waste gas treatment device and waste gas treatment technology, applied in the direction of combustion type, lighting and heating equipment, incinerator, etc., can solve the problems of poor high temperature corrosion resistance, reduce the probability of device downtime, poor reliability of waste gas treatment, etc., and achieve high temperature corrosion resistance Strong performance, reduce the probability of device downtime, and reduce the effect of secondary pollution

Pending Publication Date: 2022-07-01
上海协微环境科技有限公司
View PDF0 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to overcome the problems of harmful discharge of waste water and waste gas, poor high-temperature corrosion resistance, and poor reliability of waste gas treatment in the prior art, the present invention proposes a waste gas treatment device, which uses plasma flames to realize the purpose of gas disinfection and treatment without Wastewater discharge, reduction of secondary pollution, strong high temperature corrosion resistance, long service life, high treatment efficiency, strong reliability, reduced device shutdown probability, and realization of non-stop maintenance and other technical effects

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Waste gas treatment device
  • Waste gas treatment device
  • Waste gas treatment device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0036] Specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. However, it should be understood that the present invention is not limited to such an embodiment described below, and the technical idea of ​​the present invention may be implemented in combination with other known technologies or other technologies having the same functions as those known technologies.

[0037] In the description of the following specific embodiments, in order to clearly show the structure and working mode of the present invention, many directional words will be used to describe, but "front", "rear", "left", "right", "outside" should be used for description. "," "inwardly", "outwardly", "inwardly", "axially", "radial" and other words are to be understood as words of convenience and should not be understood as words of limitation.

[0038] Attached below Figure 1-6 Specific embodiments of the present invention will be described ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a waste gas treatment device which comprises two treatment modules, and the two treatment modules both have complete waste gas treatment capacity, namely, the two treatment modules can work independently and can also be connected with other treatment modules in parallel or in series. Each processing module comprises one or more air inlets, a plasma torch, a reaction cavity, a cooling cavity, a collector, a heat exchanger and an exhaust port. The waste gas treatment device has the advantages that the ion ignition device is long in continuous working time, short in maintenance time, free of hydration and harm removal, high in corrosion resistance and free of wastewater discharge, secondary pollution is reduced, the shutdown probability of the device is reduced, and non-shutdown maintenance is achieved.

Description

technical field [0001] The invention relates to the fields of semiconductors and chemistry, in particular to a treatment device for industrial production waste gas in the fields of semiconductors and chemistry. Background technique [0002] In the semiconductor industry, such as solar panels, wafers, liquid crystal panels and other manufacturers will produce toxic and harmful waste gas in the production process, mainly monosilane (SiH 4 ), chlorine (Cl 2 ), PFC (perfluoro compounds), etc., in the treatment of waste gas containing the above gases, four methods are usually used: adsorption method, thermal decomposition method, water washing method and combustion method. [0003] Adsorption waste gas treatment is a treatment method that passes waste gas through an adsorbent and utilizes the pore structure with developed internal structure and large specific surface area of ​​the adsorbent to efficiently adsorb certain substances to achieve harmless waste gas treatment. The ads...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Applications(China)
IPC IPC(8): F23G7/06F23G5/48
CPCF23G7/06F23G5/48
Inventor 郑洪
Owner 上海协微环境科技有限公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap