Waste gas treatment device

Abstract

The invention discloses a waste gas treatment device which comprises two treatment modules, and the two treatment modules both have complete waste gas treatment capacity, namely, the two treatment modules can work independently and can also be connected with other treatment modules in parallel or in series. Each processing module comprises one or more air inlets, a plasma torch, a reaction cavity, a cooling cavity, a collector, a heat exchanger and an exhaust port. The waste gas treatment device has the advantages that the ion ignition device is long in continuous working time, short in maintenance time, free of hydration and harm removal, high in corrosion resistance and free of wastewater discharge, secondary pollution is reduced, the shutdown probability of the device is reduced, and non-shutdown maintenance is achieved.

Description

technical field [0001] The invention relates to the fields of semiconductors and chemistry, in particular to a treatment device for industrial production waste gas in the fields of semiconductors and chemistry. Background technique [0002] In the semiconductor industry, such as solar panels, wafers, liquid crystal panels and other manufacturers will produce toxic and harmful waste gas in the production process, mainly monosilane (SiH 4 ), chlorine (Cl 2 ), PFC (perfluoro compounds), etc., in the treatment of waste gas containing the above gases, four methods are usually used: adsorption method, thermal decomposition method, water washing method and combustion method. [0003] Adsorption waste gas treatment is a treatment method that passes waste gas through an adsorbent and utilizes the pore structure with developed internal structure and large specific surface area of ​​the adsorbent to efficiently adsorb certain substances to achieve harmless waste gas treatment. The ads...

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Problems solved by technology

[0004] In order to overcome the problems of harmful discharge of waste water and waste gas, poor high-temperature corrosion resistance, and poor reliability of waste gas treatment in the prior art, the present invention proposes a waste gas treatment device, which uses plasma flames to realize the purpose of gas disinfection and treatment without Wastewater discharge, reduction of secondary pollution, strong high temperature corrosion resistance, long service life, high treatment efficiency, strong reliability, reduced device shutdown probability, and realization of non-stop maintenance and other technical effects

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