Integrated nanopore detection chip based on heterogeneous integrated packaging

Abstract

The invention provides an integrated nanopore channel detection chip based on heterogeneous integrated packaging, and the integrated nanopore channel detection chip can be applied to chip-level integration of nanopore channels, so that the integrated detection chip is realized. The method comprises the following steps: preparing a structure chip comprising a nano-pore channel array on the surface of an oxidized silicon wafer through a plurality of processes; respectively carrying out mechanochemical polishing on the structural chip and a current amplification chip of a standard CMOS (Complementary Metal-Oxide-Semiconductor Transistor) process until the thickness is the same; pasting the two polished chips to the same adapter plate, and carrying out gold thread interconnection to obtain a heterogeneous integrated packaging substrate; performing plastic packaging on the heterogeneous integrated packaging substrate by using an insulating waterproof packaging material to obtain a heterogeneous integrated packaging chip; and fixing the bottomless culture dish on the surface by adopting a stable bonding material to form a detection pool, so as to obtain the integrated nanopore detection chip.

Description

technical field [0001] The invention belongs to the technical field of semiconductor packaging, and relates to a heterogeneous integrated packaging structure of a nano-hole channel detection chip. Background technique [0002] Sequencing of biological macromolecules such as DNA and proteins is one of the most important means of biological and epidemiological research. At present, DNA detection based on PCR technology is widely used in the detection of the new crown epidemic. PCR is a technique that utilizes DNA double helix structure to amplify in vitro. In contrast, due to the complexity of the spatial structure of proteins, the reasons for the greater differences in the types of amino acids in the composition, and the lack of efficient amplification methods such as PCR, have always lacked efficient detection methods. Traditional protein sequencing methods, including Edman degradation sequencing and mass spectrometry, not only need to be compared with existing sequence lib...

AI Technical Summary

Problems solved by technology

Since the size of the detection circuit is 2 , and the electrolytic cell itself requires a certain volume, so if the detected electrolytic cell is directly coupled to the surface of the current detection chip, it means that the area of ​​the current detection chip based on the standard process needs to be increased, which greatly increases the cost of exploring nanopore technology

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