Laser six-degree-of-freedom kinematic error synchronous measurement system

Abstract

The invention discloses a laser six-degree-of-freedom kinematic error synchronous measurement system which is of a transceiving integrated structure formed by a fixed unit and a movable measurement unit, the fixed unit is installed on a fixed plane, the movable measurement unit is installed on a linear displacement platform, and a laser is used as a light source. A four-quadrant photoelectric detector and a two-dimensional position detector are used as detection devices to realize simultaneous measurement of a pitch angle, a deflection angle, a roll angle, horizontal straightness, vertical straightness and displacement of the linear displacement platform. The influence of light beam angle drift on the pitch angle, deflection angle, roll angle, horizontal straightness, vertical straightness error and displacement measurement precision is effectively eliminated by arranging the light beam angle drift detection module; the device is simple in structure and low in cost, and online measurement of the six-degree-of-freedom motion error of the linear displacement platform can be achieved at the same time.

Description

technical field [0001] The invention belongs to the technical field of optical precision measurement, and more particularly relates to a laser measurement system that can simultaneously obtain motion errors of six degrees of freedom. Background technique [0002] High-precision linear stages are used as the basis for linear motion in many industrial applications, such as precision assembly processing, semiconductor processing, micromachining, printed circuit board PCB drilling, and automatic optical inspection, which play a vital role in precision machinery. effect. The single-axis linear motion platform has positioning errors along the motion direction, straightness errors perpendicular to the motion direction (ie horizontal straightness error and vertical straightness error) and angle errors (ie pitch angle error, yaw angle error and roll angle error). error), a total of six degrees of freedom errors, the measurement of these geometric errors is a basic task of precision ...

AI Technical Summary

Problems solved by technology

[0003] The current high-precision multi-degree-of-freedom measurement system, such as the method based on laser interferometer and grating interferometer, requires many optical components, high cost, and complex optical path system, which cannot meet the requirements of compactness, low cost, and simple adjustment. , and many measurement systems are transceiver split structures, and the mobile unit is connected with cables, which affects the actual engineering use

At the same time, the angular drift of the laser beam also has a greater impact on the final measurement results

Images